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Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures

Key Lab of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, China
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Sensors 2020, 20(22), 6657; https://doi.org/10.3390/s20226657
Received: 8 October 2020 / Revised: 6 November 2020 / Accepted: 18 November 2020 / Published: 20 November 2020
(This article belongs to the Section Electronic Sensors)
Hot film sensors detect the flow shear stress based on the forced convection heat transfer to the fluid. Current hot film sensors have been significantly hindered by the relatively low sensitivity due to the massive heat conduction to the substrate. This paper describes the design, fabrication, simulation, and testing of a novel flow sensor with dual-layer hot film structures. More specifically, the heat conduction was insulated from the sensing heater to the substrate by controlling both sensing and guarding heaters working at the same temperature, resulting in a higher sensitivity. The experiment and simulation results showed that the sensitivity of the dual-layer hot film sensor was significantly improved in comparison to the single-layer sensor. Additionally, the dual-layer sensor was designed and fabricated in an integrated, flexible, and miniaturized manner. Its small size makes it an excellent candidate for flow detection. View Full-Text
Keywords: dual-layer structure; hot film; heat conduction insulation; flow shear stress dual-layer structure; hot film; heat conduction insulation; flow shear stress
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Yan, Y.-C.; Jiang, C.-Y.; Chen, R.-B.; Ma, B.-H.; Deng, J.-J.; Zheng, S.-J.; Luo, J. Highly Sensitive Flow Sensor Based on Flexible Dual-Layer Heating Structures. Sensors 2020, 20, 6657.

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