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Journal: Sensors, 2020
Volume: 20
Number: 464
Article:
Comparison of AlN vs. SIO2/LiNbO3 Membranes as Sensitive Elements for the SAW-Based Acceleration Measurement: Overcoming the Anisotropy Effects
Authors:
by
Sergey Yu. Shevchenko, Denis A. Mikhailenko and Oleg A. Markelov
Link:
https://www.mdpi.com/1424-8220/20/2/464
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