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Journal: Sensors, 2020
Volume: 20
Number: 5650

Article: Equipment Anomaly Detection for Semiconductor Manufacturing by Exploiting Unsupervised Learning from Sensory Data
Authors: by Chieh-Yu Chen, Shi-Chung Chang and Da-Yin Liao
Link: https://www.mdpi.com/1424-8220/20/19/5650

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