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Journal: Sensors, 2020
Volume: 20
Number: 5650
Article:
Equipment Anomaly Detection for Semiconductor Manufacturing by Exploiting Unsupervised Learning from Sensory Data
Authors:
by
Chieh-Yu Chen, Shi-Chung Chang and Da-Yin Liao
Link:
https://www.mdpi.com/1424-8220/20/19/5650
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