Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication Process
2.2. Electrical Characterization
3. Results
3.1. Design and Simulation
3.2. Saw Resonators on ST-Cut Quartz
3.3. Evaluation of Process Variations
3.4. Saw Resonator Performance
3.5. Variation Across a Single Wafer
4. Discussion
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
Data Availability
References
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Moutoulas, E.; Hamidullah, M.; Prodromakis, T. Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band. Sensors 2020, 20, 4294. https://doi.org/10.3390/s20154294
Moutoulas E, Hamidullah M, Prodromakis T. Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band. Sensors. 2020; 20(15):4294. https://doi.org/10.3390/s20154294
Chicago/Turabian StyleMoutoulas, Evangelos, Muhammad Hamidullah, and Themis Prodromakis. 2020. "Surface Acoustic Wave Resonators for Wireless Sensor Network Applications in the 433.92 MHz ISM Band" Sensors 20, no. 15: 4294. https://doi.org/10.3390/s20154294