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Journal: Sensors, 2019
Volume: 19
Number: 1860
Article:
Sensitivity Enhancement of Silicon-on-Insulator CMOS MEMS Thermal Hot-Film Flow Sensors by Minimizing Membrane Conductive Heat Losses
Authors:
by
Zahid Mehmood, Ibraheem Haneef, Syed Zeeshan Ali and Florin Udrea
Link:
https://www.mdpi.com/1424-8220/19/8/1860
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