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Journal: Sensors, 2019
Volume: 19
Number: 3866

Article: A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging
Authors: by Pengcheng Yan, Yulan Lu, Chao Xiang, Junbo Wang, Deyong Chen and Jian Chen
Link: https://www.mdpi.com/1424-8220/19/18/3866

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