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Open AccessArticle

A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics

1
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
2
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
*
Author to whom correspondence should be addressed.
Sensors 2019, 19(5), 1244; https://doi.org/10.3390/s19051244
Received: 7 January 2019 / Revised: 25 February 2019 / Accepted: 4 March 2019 / Published: 12 March 2019
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
In this paper, a microscale high-frequency ultrasonic transducer was prepared by combining traditional planar ultrasonic phased-array technology and micro processing technology. The piezoelectric ceramic material PZT was used as the functional material of the transducer. The number of the arrays was 72, the width of each array was 50 μm, the pitch of each array was 70 μm, and the length of each array was 3 mm. The PZT chip was finely ground to a thickness of 130 μm and could reach a frequency of 10 MHz. The experimental platform of micron-scale precision was set up for a beam-forming lateral sound field test and imaging experiment to validate the theoretical analysis. The echo imaging test showed that a mold with a feature size of about 400 μm could be imaged well. View Full-Text
Keywords: microscale; PZT; traditional planar ultrasonic phased array; the micro processing technology; beam forming; echo imaging microscale; PZT; traditional planar ultrasonic phased array; the micro processing technology; beam forming; echo imaging
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MDPI and ACS Style

Jiang, X.-J.; Liu, M.-W.; Shi, F.-F.; Wang, W.; Wu, X.-M.; Chen, J.-Y. A Microscale Linear Phased-Array Ultrasonic Transducer Based on PZT Ceramics. Sensors 2019, 19, 1244.

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