Integrated Optoelectronic Position Sensor for Scanning Micromirrors
Abstract
:1. Introduction
2. The MEMS Mirror and the Position Sensing Principle
3. The Detailed Design of the MEMS/iOE-PS Module
3.1. Optical Design and Analysis
3.2. PD Design
3.3. Readout Circuit Design
3.4. Optical Simulation
3.4.1. Vertical Displacement Simulation
3.4.2. Tilting Angle Simulation
4. Experiments and Discussion
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Cheng, X.; Sun, X.; Liu, Y.; Zhu, L.; Zhang, X.; Zhou, L.; Xie, H. Integrated Optoelectronic Position Sensor for Scanning Micromirrors. Sensors 2018, 18, 982. https://doi.org/10.3390/s18040982
Cheng X, Sun X, Liu Y, Zhu L, Zhang X, Zhou L, Xie H. Integrated Optoelectronic Position Sensor for Scanning Micromirrors. Sensors. 2018; 18(4):982. https://doi.org/10.3390/s18040982
Chicago/Turabian StyleCheng, Xiang, Xinglin Sun, Yan Liu, Lijun Zhu, Xiaoyang Zhang, Liang Zhou, and Huikai Xie. 2018. "Integrated Optoelectronic Position Sensor for Scanning Micromirrors" Sensors 18, no. 4: 982. https://doi.org/10.3390/s18040982
APA StyleCheng, X., Sun, X., Liu, Y., Zhu, L., Zhang, X., Zhou, L., & Xie, H. (2018). Integrated Optoelectronic Position Sensor for Scanning Micromirrors. Sensors, 18(4), 982. https://doi.org/10.3390/s18040982