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Sensors 2017, 17(6), 1381;

Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film

State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Science, Beijing 100190, China
Author to whom correspondence should be addressed.
Academic Editor: Mustafa Yavuz
Received: 10 March 2017 / Revised: 17 May 2017 / Accepted: 8 June 2017 / Published: 14 June 2017
(This article belongs to the Special Issue MEMS and Nano-Sensors)
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A square piezoelectric composite diaphragm was analyzed by the finite element method to enhance the sensitivity of a piezoelectric micromachined ultrasound transducer (pMUT). The structures of electrode and piezoelectric film were optimized and a centric electrode was designed to avoid the counteraction of stress in the centre and edges. In order to further improve the sensitivity; a pMUT with partially-etched piezoelectric film was adopted. The receive and transmit sensitivities of the pMUT were analyzed in details. The receive sensitivity of pMUT with partially-etched ZnO film is 3.3 dB or 6.8 dB higher than those with a centric and whole electrode, respectively; and the amplitude of a partially-etched ZnO film pMUT under a certain voltage is 5.5 dB and 30 dB higher than those with centric and whole electrode separately. Two pMUT-based ZnO films were fabricated by micromachining technology and their receive and transmit sensitivities were tested. The ZnO films deposited by direct current (DC) magnetron sputtering exhibit a densely packed structure with columnar crystallites. The test results show that the structure of the square diaphragm with partially-etched piezoelectric layer can significantly improve the transducer sensitivity. The receive sensitivity and transmit sensitivity are −238.35 dB (ref. 1 V/μPa) and 150.42 dB (ref. 1 μPa/V); respectively. View Full-Text
Keywords: pMUT; centric electrode structure; ZnO film; partially-etched; sensitivity pMUT; centric electrode structure; ZnO film; partially-etched; sensitivity

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Li, J.; Ren, W.; Fan, G.; Wang, C. Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film. Sensors 2017, 17, 1381.

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