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Journal: Sensors, 2017
Volume: 17
Number: 1381

Article: Design and Fabrication of Piezoelectric Micromachined Ultrasound Transducer (pMUT) with Partially-Etched ZnO Film
Authors: by Junhong Li, Wei Ren, Guoxiang Fan and Chenghao Wang
Link: https://www.mdpi.com/1424-8220/17/6/1381

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