Next Article in Journal
Sensors for Entertainment
Next Article in Special Issue
Ultrasensitive, Label Free, Chemiresistive Nanobiosensor Using Multiwalled Carbon Nanotubes Embedded Electrospun SU-8 Nanofibers
Previous Article in Journal
Sensing Urban Patterns with Antenna Mappings: The Case of Santiago, Chile
Previous Article in Special Issue
A Unique Self-Sensing, Self-Actuating AFM Probe at Higher Eigenmodes
Article Menu

Export Article

Open AccessArticle
Sensors 2016, 16(7), 1097;

Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Department of Micro- and Nanotechnology, Technical University of Denmark, Kgs. Lyngby 2800, Denmark
Institute of Sensor and Actuator Systems, TU Wien, Vienna 1040, Austria
Author to whom correspondence should be addressed.
Academic Editor: Marc Madou
Received: 2 May 2016 / Revised: 27 June 2016 / Accepted: 11 July 2016 / Published: 15 July 2016
(This article belongs to the Special Issue Carbon MEMS and NEMS for Sensor Applications)
Full-Text   |   PDF [1901 KB, uploaded 15 July 2016]   |  


Micro- and nanomechanical string resonators, which essentially are highly stressed bridges, are of particular interest for micro- and nanomechanical sensing because they exhibit resonant behavior with exceptionally high quality factors. Here, we fabricated and characterized nanomechanical pyrolytic carbon resonators (strings and cantilevers) obtained through pyrolysis of photoresist precursors. The developed fabrication process consists of only three processing steps: photolithography, dry etching and pyrolysis. Two different fabrication strategies with two different photoresists, namely SU-8 2005 (negative) and AZ 5214e (positive), were compared. The resonant behavior of the pyrolytic resonators was characterized at room temperature and in high vacuum using a laser Doppler vibrometer. The experimental data was used to estimate the Young’s modulus of pyrolytic carbon and the tensile stress in the string resonators. The Young’s moduli were calculated to be 74 ± 8 GPa with SU-8 and 115 ± 8 GPa with AZ 5214e as the precursor. The tensile stress in the string resonators was 33 ± 7 MPa with AZ 5214e as the precursor. The string resonators displayed maximal quality factor values of up to 3000 for 525-µm-long structures. View Full-Text
Keywords: MEMS; resonators; pyrolysis; pyrolytic carbon; microfabrication MEMS; resonators; pyrolysis; pyrolytic carbon; microfabrication

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Kurek, M.; Larsen, F.K.; Larsen, P.E.; Schmid, S.; Boisen, A.; Keller, S.S. Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties. Sensors 2016, 16, 1097.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top