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Sensors 2016, 16(7), 1056;

Design and Analysis of a New Hair Sensor for Multi-Physical Signal Measurement

School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, Nanjing 210096, China
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 28 April 2016 / Revised: 17 June 2016 / Accepted: 20 June 2016 / Published: 8 July 2016
(This article belongs to the Collection Modeling, Testing and Reliability Issues in MEMS Engineering)
Full-Text   |   PDF [8132 KB, uploaded 8 July 2016]   |  


A new hair sensor for multi-physical signal measurements, including acceleration, angular velocity and air flow, is presented in this paper. The entire structure consists of a hair post, a torsional frame and a resonant signal transducer. The hair post is utilized to sense and deliver the physical signals of the acceleration and the air flow rate. The physical signals are converted into frequency signals by the resonant transducer. The structure is optimized through finite element analysis. The simulation results demonstrate that the hair sensor has a frequency of 240 Hz in the first mode for the acceleration or the air flow sense, 3115 Hz in the third and fourth modes for the resonant conversion, and 3467 Hz in the fifth and sixth modes for the angular velocity transformation, respectively. All the above frequencies present in a reasonable modal distribution and are separated from interference modes. The input-output analysis of the new hair sensor demonstrates that the scale factor of the acceleration is 12.35 Hz/g, the scale factor of the angular velocity is 0.404 nm/deg/s and the sensitivity of the air flow is 1.075 Hz/(m/s)2, which verifies the multifunction sensitive characteristics of the hair sensor. Besides, the structural optimization of the hair post is used to improve the sensitivity of the air flow rate and the acceleration. The analysis results illustrate that the hollow circular hair post can increase the sensitivity of the air flow and the II-shape hair post can increase the sensitivity of the acceleration. Moreover, the thermal analysis confirms the scheme of the frequency difference for the resonant transducer can prominently eliminate the temperature influences on the measurement accuracy. The air flow analysis indicates that the surface area increase of hair post is significantly beneficial for the efficiency improvement of the signal transmission. In summary, the structure of the new hair sensor is proved to be feasible by comprehensive simulation and analysis. View Full-Text
Keywords: hair sensor; acceleration; angular velocity; air flow rate; resonant transducer hair sensor; acceleration; angular velocity; air flow rate; resonant transducer

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Yang, B.; Hu, D.; Wu, L. Design and Analysis of a New Hair Sensor for Multi-Physical Signal Measurement. Sensors 2016, 16, 1056.

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