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Volume 16
Issue 7
10.3390/s16071025
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Article

Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor

by
Hyo Ryeol Lee
1,
Gil Seung Lee
2,
Hwa Young Kim
3 and
Jung Hwan Ahn
1,*
1
School of Mechanical Engineering, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea
2
NOVASEN Co., LTD, 25, Bansong-ro 525 beon gil, Haeundae-gu, Busan 48002, Korea
3
Research Institute of Mechanical Technology, Pusan National University, 2, Busandaehak-ro 63 beon gil, Geumjeong-gu, Busan 46241, Korea
*
Author to whom correspondence should be addressed.
Sensors 2016, 16(7), 1025; https://doi.org/10.3390/s16071025
Submission received: 7 April 2016 / Revised: 21 June 2016 / Accepted: 22 June 2016 / Published: 1 July 2016
(This article belongs to the Section Physical Sensors)
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Abstract

The aim of this work was to develop an eddy current type pressure sensor and investigate its fundamental characteristics affected by the mechanical and electrical design parameters of sensor. The sensor has two key components, i.e., diaphragm and coil. On the condition that the outer diameter of sensor is 10 mm, two key parts should be designed so as to keep a good linearity and sensitivity. Experiments showed that aluminum is the best target material for eddy current detection. A round-grooved diaphragm is suggested in order to measure more precisely its deflection caused by applied pressures. The design parameters of a round-grooved diaphragm can be selected depending on the measuring requirements. A developed pressure sensor with diaphragm of t = 0.2 mm and w = 1.05 mm was verified to measure pressure up to 10 MPa with very good linearity and errors of less than 0.16%.
Keywords: eddy current; pressure sensor; round-groove; impedance change eddy current; pressure sensor; round-groove; impedance change

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MDPI and ACS Style

Lee, H.R.; Lee, G.S.; Kim, H.Y.; Ahn, J.H. Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor. Sensors 2016, 16, 1025. https://doi.org/10.3390/s16071025

AMA Style

Lee HR, Lee GS, Kim HY, Ahn JH. Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor. Sensors. 2016; 16(7):1025. https://doi.org/10.3390/s16071025

Chicago/Turabian Style

Lee, Hyo Ryeol, Gil Seung Lee, Hwa Young Kim, and Jung Hwan Ahn. 2016. "Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor" Sensors 16, no. 7: 1025. https://doi.org/10.3390/s16071025

APA Style

Lee, H. R., Lee, G. S., Kim, H. Y., & Ahn, J. H. (2016). Design of Diaphragm and Coil for Stable Performance of an Eddy Current Type Pressure Sensor. Sensors, 16(7), 1025. https://doi.org/10.3390/s16071025

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