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Sensors 2016, 16(5), 691;

Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation

College of Engineering, ZheJiang Normal University, Jinhua 321004, China
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M. N. Passaro
Received: 6 March 2016 / Revised: 7 May 2016 / Accepted: 9 May 2016 / Published: 13 May 2016
(This article belongs to the Section Physical Sensors)
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A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and tested. It is shown by the experimental results that a very simple structure and geometric relationship are achieved. Meanwhile, displacement sensitivity on an order of 1.50 mV per micron and measurement repeatability better than 0.002 mm are easily fulfilled for a square zone of 256 mm2, making it a valuable alternative measurement device candidate for flexible and low-cost planar position detection. View Full-Text
Keywords: planar position; capacitive sensor; mono-electrode; hybrid-frequency planar position; capacitive sensor; mono-electrode; hybrid-frequency

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Yu, H.; Zhang, Y.; Shen, M.; Zhang, H.; Gao, Z.; Wang, D. Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation. Sensors 2016, 16, 691.

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