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Sensors 2015, 15(3), 6872-6884;

A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications

School of Electrical and Electronic Engineering, East China Jiao Tong University, Nanchang 330013, China
School of Electrical Engineering and Automation, Hefei University of Technology, Hefei 230009, China
Author to whom correspondence should be addressed.
Academic Editor: Vittorio M.N. Passaro
Received: 27 November 2014 / Revised: 8 March 2015 / Accepted: 9 March 2015 / Published: 23 March 2015
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [1008 KB, uploaded 23 March 2015]   |  


This paper presents a novel monolithic pressure sensor tag for passive wireless applications. The proposed pressure sensor tag is based on an ultra-high frequency RFID system. The pressure sensor element is implemented in the 0.18 µm CMOS process and the membrane gap is formed by sacrificial layer release, resulting in a sensitivity of 1.2 fF/kPa within the range from 0 to 600 kPa. A three-stage rectifier adopts a chain of auxiliary floating rectifier cells to boost the gate voltage of the switching transistors, resulting in a power conversion efficiency of 53% at the low input power of −20 dBm. The capacitive sensor interface, using phase-locked loop archietcture, employs fully-digital blocks, which results in a 7.4 bits resolution and 0.8 µW power dissipation at 0.8 V supply voltage. The proposed passive wireless pressure sensor tag costs a total 3.2 µW power dissipation. View Full-Text
Keywords: pressure sensor; RFID technology; CMOS process; capacitive sensor interface; rectifier pressure sensor; RFID technology; CMOS process; capacitive sensor interface; rectifier

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Deng, F.; He, Y.; Li, B.; Zuo, L.; Wu, X.; Fu, Z. A CMOS Pressure Sensor Tag Chip for Passive Wireless Applications. Sensors 2015, 15, 6872-6884.

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