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Sensors 2015, 15(12), 30991-31004;

Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror

School of Electronic and Information Engineering, Soochow University, Suzhou 215006, China
Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida, FL 32611-6200, USA
Wuxi WiO Technology Co. Ltd, Wuxi 214000, China
Author to whom correspondence should be addressed.
Academic Editor: Stefano Mariani
Received: 22 October 2015 / Revised: 27 November 2015 / Accepted: 30 November 2015 / Published: 10 December 2015
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [3180 KB, uploaded 10 December 2015]   |  


In this paper, the actuation behavior of a two-axis electrothermal MEMS (Microelectromechanical Systems) mirror typically used in miniature optical scanning probes and optical switches is investigated. The MEMS mirror consists of four thermal bimorph actuators symmetrically located at the four sides of a central mirror plate. Experiments show that an actuation characteristics difference of as much as 4.0% exists among the four actuators due to process variations, which leads to an average angular scan error of 0.03°. A mathematical model between the actuator input voltage and the mirror-plate position has been developed to predict the actuation behavior of the mirror. It is a four-input, four-output model that takes into account the thermal-mechanical coupling and the differences among the four actuators; the vertical positions of the ends of the four actuators are also monitored. Based on this model, an open-loop control method is established to achieve accurate angular scanning. This model-based open loop control has been experimentally verified and is useful for the accurate control of the mirror. With this control method, the precise actuation of the mirror solely depends on the model prediction and does not need the real-time mirror position monitoring and feedback, greatly simplifying the MEMS control system. View Full-Text
Keywords: electrothermal actuator; MEMS mirror; static deviation; model based open-loop control electrothermal actuator; MEMS mirror; static deviation; model based open-loop control

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Zhang, H.; Xu, D.; Zhang, X.; Chen, Q.; Xie, H.; Li, S. Model-Based Angular Scan Error Correction of an Electrothermally-Actuated MEMS Mirror. Sensors 2015, 15, 30991-31004.

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