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Sensors 2014, 14(12), 22199-22207;

A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor

Department of Electrical Engineering, Kwangwoon University, 447-1, Wolgye, Nowon, Seoul 139-701, Korea
Korea Institute of Science and Technology (KIST), Seoul 136-791, Korea
Department of Chemical Engineering, Kangwon National University, Chuncheon 200-701, Korea
These authors contributed equally to this work.
Authors to whom correspondence should be addressed.
Received: 25 June 2014 / Revised: 16 October 2014 / Accepted: 11 November 2014 / Published: 25 November 2014
(This article belongs to the Section Physical Sensors)
Full-Text   |   PDF [3399 KB, uploaded 25 November 2014]


The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor. View Full-Text
Keywords: force sensor; tactile sensor; piezoelectric; thin film; MEMS force sensor; tactile sensor; piezoelectric; thin film; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Lee, J.; Choi, W.; Yoo, Y.K.; Hwang, K.S.; Lee, S.-M.; Kang, S.; Kim, J.; Lee, J.H. A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor. Sensors 2014, 14, 22199-22207.

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