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Sensors 2012, 12(10), 13075-13087;

Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications

1 Department of Energy and Refrigerating Air-Conditioning Engineering, National Taipei University of Technology, Taipei 10608, Taiwan
Author to whom correspondence should be addressed.
Received: 31 July 2012 / Revised: 28 August 2012 / Accepted: 22 September 2012 / Published: 26 September 2012
(This article belongs to the Special Issue Microfluidic Devices)
Full-Text   |   PDF [810 KB, uploaded 21 June 2014]


This study presents an electromagnetically-actuated reciprocating pump for high-flow-rate microfluidic applications. The pump comprises four major components, namely a lower glass plate containing a copper microcoil, a middle PMMA plate incorporating a PDMS diaphragm with a surface-mounted magnet, upper PMMA channel plates, and a ball-type check valve located at the channel inlet. When an AC current is passed through the microcoil, an alternating electromagnetic force is established between the coil and the magnet. The resulting bi-directional deflection of the PDMS diaphragm causes the check-valve to open and close; thereby creating a pumping effect. The experimental results show that a coil input current of 0.4 A generates an electromagnetic force of 47 mN and a diaphragm deflection of 108 μm. Given an actuating voltage of 3 V and a driving frequency of 15 Hz, the flow rate is found to be 13.2 mL/min under zero head pressure conditions. View Full-Text
Keywords: electromagnetic pump; electroplating; MEMS; PDMS diaphragm electromagnetic pump; electroplating; MEMS; PDMS diaphragm
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Ke, M.-T.; Zhong, J.-H.; Lee, C.-Y. Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications. Sensors 2012, 12, 13075-13087.

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