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Open AccessArticle

A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

1
Department of Chemistry, Faculty of Science, University of Paderborn, Warburger Str. 100, D-33098 Paderborn, Germany
2
Max-Planck-Institute for Solid State Research, Nanoscale Science Department, Heisenbergstr. 1, D-70569 Stuttgart, Germany
3
Institute for Applied Physics, Justus Liebig University, Heinrich-Buff-Ring 16, D-35390 Giessen, Germany
4
Institute of Inorganic and Analytical Chemistry, Justus Liebig University, Heinrich-Buff-Ring 16, D-35390 Giessen, Germany
*
Author to whom correspondence should be addressed.
Sensors 2011, 11(3), 3135-3144; https://doi.org/10.3390/s110303135
Received: 30 January 2011 / Revised: 20 February 2011 / Accepted: 25 February 2011 / Published: 14 March 2011
(This article belongs to the Special Issue Gas Sensors - 2010)
Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets. Investigation of the structural stability of the porous silica under simulated operating conditions as well as the influence of the pellet production will be shown. Impedance measurements demonstrate the utility of the sensor at both low (90 °C) and high (up to 210 °C) operating temperatures. View Full-Text
Keywords: capacitive sensor; humidity; high temperature; mesoporous silica capacitive sensor; humidity; high temperature; mesoporous silica
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MDPI and ACS Style

Wagner, T.; Krotzky, S.; Weiß, A.; Sauerwald, T.; Kohl, C.-D.; Roggenbuck, J.; Tiemann, M. A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica. Sensors 2011, 11, 3135-3144.

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