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Sensors 2011, 11(10), 9807-9819;

Support Loss and Q Factor Enhancement for a Rocking Mass Microgyroscope

School of Mechanical Engineering and Automation, National University of Defense Technology, Changsha, Hunan 410073, China
Author to whom correspondence should be addressed.
Received: 15 September 2011 / Revised: 10 October 2011 / Accepted: 17 October 2011 / Published: 19 October 2011
(This article belongs to the Section Physical Sensors)
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A rocking mass gyroscope (RMG) is a kind of vibrating mass gyroscope with high sensitivity, whose driving mode and sensing mode are completely uniform. MEMS RMG devices are a research hotspot now because they have the potential to be used in space applications. Support loss is the dominant energy loss mechanism influencing their high sensitivity. An accurate analytical model of support loss for RMGs is presented to enhance their Q factors. The anchor type and support loss mechanism of an RMG are analyzed. Firstly, the support loads, powers flowing into support structure, and vibration energy of an RMG are all developed. Then the analytical model of support loss for the RMG is developed, and its sensitivities to the main structural parameters are also analyzed. High-Q design guidelines for rocking mass microgyroscopes are deduced. Finally, the analytical model is validated by the experimental data and the data from the existing literature. The thicknesses of the prototypes are reduced from 240 µm to 60 µm, while Q factors increase from less than 150 to more than 800. The derived model is general and applicable to various beam resonators, providing significant insight to the design of high-Q MEMS devices. View Full-Text
Keywords: rocking mass gyroscope; microgyroscope; support loss; Q factor rocking mass gyroscope; microgyroscope; support loss; Q factor

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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Wang, X.; Xiao, D.; Zhou, Z.; Wu, X.; Chen, Z.; Li, S. Support Loss and Q Factor Enhancement for a Rocking Mass Microgyroscope. Sensors 2011, 11, 9807-9819.

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