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Journal: MoleculesVolume: 28Number: 5664
Article: Mass Spectra Fitting as Diagnostic Tool for Magnetron Plasmas Generated in Ar and Ar/H2 Gases with Tungsten Targets
- Authors:
- Cristina Craciun1,2,
- Silviu Daniel Stoica1 and
- Bogdana Maria Mitu1
- et al.
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