Search Results (42)

A prescribed-performance-based sliding mode control method with feed-forward inverse compensation is proposed in this study to improve the micropositioning accuracy and convergence speed of a piezoelectric actuator (PEA). Firstly, the piezo-actuated micropositioning system is described by a Hammerstein structure model, and an inverse Prandtl–Ishlinskii (PI) model was employed to compensate for its hysteresis characteristics. Then, considering modelling errors, inverse compensation errors, and external disturbances, a new prescribed performance function (PPF) with an exponential dynamic decay rate was developed to describe the constrained region of the errors. We then transformed the error into an unconstrained form by constructing a monotonic function, and the sliding variables were obtained by using the transformation error. Based on this, a sliding mode controller with a prescribed performance function (SMC-PPF) was designed to improve the control accuracy of PEAs. Furthermore, we demonstrated that the error can converge to the constrained region and the sliding variables are stable within the switching band. Finally, experiments were conducted to verify the speed and accuracy of the controller. The step-response experiment results indicated that the time taken for SMC-PPC to enter the error window was 8.1 and 2.2 ms faster than that of sliding mode control (SMC) and PID, respectively. The ability of SMC-PPF to improve accuracy was verified using four different reference inputs. These results showed that, for these different inputs, the root mean square error of the SMC-PPF was reduced by over $39.6\%$ and $52.5\%$, compared with the SMC and PID, respectively. Full article

This work presents the theoretical design and finite element modeling of high-sensitivity microcantilevers for biosensing applications, integrating piezoelectric actuation with novel ultrananocrystalline diamond (UNCD) structures. Microcantilevers were designed based on projections to grow a multilayer metal/AlN/metal/UNCD stack on silicon substrates, optimized to detect adsorption of biomolecules on the surface of exposed UNCD microcantilevers at the picogram scale. A central design criterion was to match the microcantilever’s eigenfrequency with the resonant frequency of the AlN-based piezoelectric actuator, enabling efficient dynamic excitation. The beam length was tuned to ensure a ≥2 kHz resonant frequency shift upon adsorption of 1 pg of mass distributed on the exposed surface of a UNCD-based microcantilever. Subsequently, a Gaussian distribution mass function with a variance of 5 µm was implemented to evaluate the resonant frequency shift upon mass addition at a certain point on the microcantilever where a variation from 600 Hz to 100 Hz was observed when the mass distribution center was located at the tip of the microcantilever and the piezoelectric borderline, respectively. Both frequency and time domain analyses were performed to predict the resonance behavior, oscillation amplitude, and quality factor. To ensure the reliability of the simulations, the model was first validated using experimental results reported in the literature for an AlN/nanocrystalline diamond (NCD) microcantilever. The results confirmed that the AlN/UNCD architecture exhibits higher resonant frequencies and enhanced sensitivity compared to equivalent AlN/Si structures. The findings demonstrate that using a UNCD-based microcantilever not only improves biocompatibility but also significantly enhances the mechanical performance of the biosensor, offering a robust foundation for the development of next-generation MEMS-based biochemical detection platforms. The research reported here introduces a novel design methodology that integrates piezoelectric actuation with UNCD microcantilevers through eigenfrequency matching, enabling efficient picogram-scale mass detection. Unlike previous approaches, it combines actuator and cantilever optimization within a unified finite element framework, validated against experimental data published in the literature for similar piezo-actuated sensors using materials with inferior biocompatibility compared with the novel UNCD. The dual-domain simulation strategy offers accurate prediction of key performance metrics, establishing a robust and scalable path for next-generation MEMS biosensors. Full article

In this study, we present two configurations of piezo-actuated microspeakers, which were fabricated by combining a self-developed aerosol deposition method with the metal MEMS microfabrication process. The stainless steel used was structurally designed to enhance the displacement amplitude of the speaker, which is related to its sound pressure level. The two packaged speakers were measured using the IEC 60318-4 standard. The package around the speaker contains a printed circuit board with the dimensions in 20.0 mm × 13.0 mm × 3.0 mm. In an enclosed field test, the bimorph single-layer (BSL) configuration reached sound levels of 98.4 dB and 92.4 dB using driving voltages of 30 Vpp and 15 Vpp at 1 kHz, respectively; however, the bimorph multi-layer (BML) configuration reached higher levels of 108.2 dB and 102.2 dB under the same conditions. Full article

Graphene superlattices have simple and controllable electronic band structures, which can also be electrostatically tuned. They have been widely studied for band engineering and strong correlated physics, and have led to the discovery of a variety of exciting phenomena. To experimentally study the physics of graphene superlattices in a systematic way, it is desirable to control the structure parameters, which barely exist at the moment, onsite. Here, a tunable superlattice with graphene and a deformable gating structure is demonstrated. The period and duty cycle of the nano-gating, and furthermore of the superlattice potential, can be tuned through altering the shape of the gating structure with piezo-actuators, offering a tunable band structure. The tuning of the electronic band structures of both a two-dimensional and a one-dimensional superlattice is demonstrated with numerical simulations, offering a new approach for tunable electronic and photonic devices. Full article

This work presents a study on the modeling, analysis, and control of asymmetric source structures, which focuses on a multi-directional active mounting system that aims to consider the location and orientation of an actual automotive powertrain mount. An active mount was created by connecting a PZT (piezo-stack) actuator with a rubber grommet. Additional force necessary for every mount was determined by using forces caused by harmonic stimulation and the control input has the capability to reduce vibrations by engaging in detrimental opposition against the input. In addition, the vibration in the horizontal direction can be reduced with the adjustment of variables that can be modified via the dynamic interconnection of the source frame. This study especially evaluated the effectiveness of vibration reduction without a horizontal active component and determined the feasibility of control. Through sequences of simulated outcomes, it was demonstrated that the implementation of this asymmetric, bi-directional (both horizontally and vertically) active mount may effectively reduce stimulation oscillations. Additionally, a numerical validation was performed to reduce the vibrations generated by the modulation. It was accomplished by observing the system’s response utilizing a digital filter with a normalized least mean square method. The simulations of adaptive digital filters demonstrated that the efficacy of control diminishes when faced with intricate noise and signals, while the attenuation trend stays unaltered. Full article

One of the effective methods of non-destructive testing of structures is active vibration diagnostics. This approach consists of the local dynamic impact of the actuator on the structure and the registration of the vibration response. Testing of massive reinforced concrete structures is carried out with the use of actuators, which are able to create sufficiently high-impact loads. The actuators, which are based on piezoelectric elements, cannot provide a sufficient level of force and the areas where it is possible to register the vibrations excited by such actuators are quite small. In this paper, we propose a variant of a piezoactuator with attached mass, which ensures an increase in the level of dynamic impact on the structure. The effectiveness of this version is verified by numerical modeling of the dynamic interaction of the actuator with a concrete slab. The simulation was carried out within the framework of the theory of elasticity and coupled electroelasticity. An algorithm for selecting the value of the attached mass is described. It is shown that when vibrations are excited in a massive concrete slab, an actuator with an attached mass of 1.3 kg provides a 10,000-fold increase in the force compared to an actuator without attached mass. In the pulse mode, a 100-fold increase in force is achieved. Full article

This study investigates the feasibility of utilizing a flow-induced vibration actuator as a potential energy source using piezoelectric energy harvesting. The focus is on exploring the behavior of piezo films configured as cantilever beams subjected to flow-induced vibration, which can be induced with fluid or wind streams. The primary objective is to maximize the harvested energy from the vibrating structure. This paper develops theoretical models to analyze the resonant frequencies and energy-harvesting potential of the piezo films in the context of flow-induced vibration. Experimental validations are conducted to verify the theoretical predictions. The findings indicate that higher operating frequencies in the second mode offer improved energy harvesting efficiency compared with lower modes. With the strategic adjustment of resonant frequencies using attached masses on individual piezo films, the harvestable energy output of a single film can be significantly increased from less than 1 μW to approximately 18 μW. However, the phase differences among individual piezo films can impact frequency measurements, necessitating careful fine-tuning of the physical conditions of individual components. To optimize energy harvesting, this study emphasizes the importance of implementing efficient charging mechanisms. By identifying suitable environmental vibration sources, the required charging duration for a synthesized energy harvesting array can be reduced by 25% as well. Despite certain challenges, such as phase deviations and turbulence, this study demonstrates the promising potential of flow-induced vibration resonators as sustainable energy sources. This work lays the foundation for further advancements in energy harvesting technology, offering environmentally friendly and renewable energy solutions. Full article

In this work, the effects of some geometric and mechanical parameters that characterize curved and relatively soft structures integrated with piezoelectric actuators are investigated. The effect of parameters such as the curvature, location, and extension of the piezo device, as well as the thickness of the bonding and its strength, are considered in view of a potentially lighter model that replaces the piezoelectric device via its actions, namely pin forces, whose layout and values are strongly dependent on the curvature. When comparing the results obtained by a finite element model of the structure with the piezo device and of the structure alone under the action of pin forces, dedicated indicators were found, which could be useful to support lighter modeling approaches and to predict the authority of the piezoelectric device. Full article

With a simple structure and control method, the piezo-inertia actuator is a preferred embodiment in the field of microprecision industry. However, most of the previously reported actuators are unable to achieve a high speed, high resolution, and low deviation between positive and reverse velocities at the same time. To achieve a high speed, high resolution, and low deviation, in this paper we present a compact piezo-inertia actuator with a double rocker-type flexure hinge mechanism. The structure and operating principle are discussed in detail. To study the load capacity, voltage characteristics, and frequency characteristics of the actuator, we made a prototype and conducted a series of experiment. The results indicate good linearity in both positive and negative output displacements. The maximum positive and negative velocities are about 10.63 mm/s and 10.12 mm/s, respectively, and the corresponding speed deviation is 4.9%. The positive and negative positioning resolutions are 42.5 nm and 52.5 nm, respectively. In addition, the maximum output force is 220 g. These results show that the designed actuator has a minor speed deviation and good output characteristics. Full article

When overmoulding optoelectronic devices with optical elements, precise alignment of the overmoulded part and the mould is of great importance. However, mould-integrated positioning sensors and actuators are not yet available as standard components. As a solution, we present a mould-integrated optical coherence tomography (OCT) device that is combined with a piezo-driven mechatronic actuator, which is capable of performing the necessary displacement correction. Because of the complex geometric structure optoelectronic devices may have, a 3D imaging method was preferable, so OCT was chosen. It is shown that the overall concept leads to sufficient alignment accuracy and, apart from compensating for the in-plane position error, provides valuable additional information about the sample both before and after the injection process. The increased alignment accuracy leads to better energy efficiency, improved overall performance and less scrap parts, and thus even a zero-waste production process might be feasible. Full article

This paper presents a flexure-based displacement reduction mechanism driven by a voice coil motor to improve the motion resolution and eliminate the hysteresis nonlinearity of the traditional piezo-actuated micropositioning/nanopositioning stages. The mechanism is composed of three groups of compound bridge-type displacement reduction mechanisms, which adopt distributed-compliance rectangular beams to reduce the concentration of stress and improve the dynamic performance of the mechanism. The symmetrical distribution of the structure can eliminate the parasitic displacement of the mechanism and avoid the bending moment and lateral stress applied to the voice coil motor. Firstly, the analytical model of the mechanism is obtained by the stiffness matrix method. The theoretical displacement reduction ratio, input stiffness, and natural frequency of the displacement reduction mechanism are obtained by solving the analytical model. Then, through the static analysis and modal analysis of the mechanism with the Ansys software, the accuracy of the analytical model is verified, and the experimental prototype is also constructed for performance tests. The results show that the maximum stroke of the mechanism is 197.43 μm with motion resolution of 40 nm. The natural frequency is 291 Hz, and the input stiffness is 28.50 N/mm. Finally, the trajectory tracking experiment is carried out to verify the positioning performance of the mechanism. The experimental results show that the designed feedback controller has good stability, and the introduction of the feedforward controller and disturbance observer can greatly reduce the tracking errors. Full article

A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices. Full article

This paper introduces a new loading condition considering the combined thermo-electro-mechanical coupling effect in a series solution-based approach to analyze the free-edge interlaminar stresses in smart composite laminates. The governing equations are developed using the principle of complementary virtual work. The assumed stress fields satisfy the traction-free and free-edge boundary conditions. The accurate stress states of the composite structures are acquired through the procedure of generalized eigenvalue problems. The uniform temperature is employed throughout the laminate, and the electric field loading is applied to the symmetric piezo-bonded actuators to examine the combined effect of thermal and electrical stresses on the overall deformation of smart composite laminates. It was observed that the magnitude of the peeling stresses generated by mechanical loading was reduced by the combined thermal and electric excitation loading (up to 25.3%), which in turn resulted in expanding the service life of the smart composite structures. The proposed approach is implemented on three different layup configurations. The efficiency of the current methodology is confirmed by comparing the results with the 3D finite element (FEM) solution computed by ABAQUS. Full article

Combining the specific advantages of high-resolution liquid-crystal-on-silicon spatial light modulators (LCoS-SLMs) and reflective or refractive micro-electro-mechanical systems (MEMS) presents new prospects for the generation of structured light fields. In particular, adaptive self-apodization schemes can significantly reduce diffraction by low-loss spatial filtering. The concept enables one to realize low-dispersion shaping of nondiffracting femtosecond wavepackets and to temporally switch, modulate or deflect spatially structured beams. Adaptive diffraction management by structured illumination is demonstrated for piezo-based and thermally actuated axicons, spiral phase plates (SPPs) and Fresnel bi-mirrors. Improved non-collinear autocorrelation with angular-tunable Fresnel-bi-mirrors via self-apodized illumination and phase contrast of an SLM is proposed. An extension of the recently introduced nondiffractive Talbot effect to a tunable configuration by combining an SLM and a fluid lens is reported. Experimental results for hexagonal as well as orthogonal array beams are presented. Full article

The performance of a piezoelectric actuator for active noise cancellation depends primarily on the quality of the actuator material and its design approach, i.e., single-layer or multi-layer actuators, stacks, benders, or amplified actuators. In this paper, material selection and multiphysics modeling were performed to develop an optimal piezoelectric plate actuator for active noise cancellation. The material selection process was analyzed using two multi-criteria decision making (MCDM) approaches for material selection, i.e., figure of merit (FOM) for actuators and the technique for order of performance by similarity to ideal solution (TOPSIS). Of the 12 state-of-the-art piezoelectric actuator materials considered in this article, PMN–28% PT is the best material according to TOPSIS analysis, while $\left[Pb\left(I{n}_{\raisebox{1ex}{$1$}\!\left/ \!\raisebox{-1ex}{$2$}\right.}N{b}_{\raisebox{1ex}{$1$}\!\left/ \!\raisebox{-1ex}{$2$}\right.}\right)O_3\right]24\%-Pb\left(M{g}_{\raisebox{1ex}{$1$}\!\left/ \!\raisebox{-1ex}{$3$}\right.}N{b}_{\raisebox{1ex}{$1$}\!\left/ \!\raisebox{-1ex}{$3$}\right.}\right)O_3-PbTi{O}_3$ (PIN24%-PMN-PT) is the best material according to FOM analysis. The ranking of state-of-the-art piezoelectric material categories for actuators according to the two analysis is consistent and the category of monocrystalline piezoelectric materials has the highest actuation performance. The multiphysics modeling was performed using ANSYS Mechanical using two different approaches: one using Ansys Parametric Design Language (APDL) command fragments, the other installing the PiezoAndMEMS ACT extension in ANSYS. Static structure, modal, and harmonic response analyses were performed to determine an optimal pair of piezoelectric plates to be used as an actuator for active noise cancellation. A pair of plates of the same materials, but of different dimensions turns out to be the optimal piezoelectric plate actuator for active noise reduction, according to the two multiphysics modeling methods. Full article