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Keywords = oxygen plasma ashing process

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10 pages, 3918 KB  
Article
Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths
by Qing Guo, Jinkui Chu, Chuanlong Guan, Chuxiao Zhang and Ran Zhang
Micromachines 2025, 16(1), 74; https://doi.org/10.3390/mi16010074 - 10 Jan 2025
Viewed by 1095
Abstract
The polarization state of light is critical for biological imaging, acousto-optics, bio-navigation, and many other optical applications. Phase shifters are extensively researched for their applications in optics. The size of optical elements with phase delay that are made from natural birefringent materials is [...] Read more.
The polarization state of light is critical for biological imaging, acousto-optics, bio-navigation, and many other optical applications. Phase shifters are extensively researched for their applications in optics. The size of optical elements with phase delay that are made from natural birefringent materials is limited; however, fabricating waveplates from dielectric metamaterials is very complex and expensive. Here, we present an ultrathin (14 nm) metallic phase shifter developed using nanoimprinting technology and the oxygen plasma ashing technique for visible and near-infrared wavelengths. The fabrication process can produce desirable metallic phase shifters with high efficiency, large area, and low cost. We demonstrate through a numerical simulation and experiment that the metallic phase shifter exhibits phase delay performance. Our results highlight the simplicity of the fabrication process for a metallic phase shifter with phase delay performance and offer important opportunities for creating high-efficiency, ultrathin polarizing elements, which can be used in miniaturized devices, such as integrated circuits. Full article
(This article belongs to the Special Issue Nanostructured Optoelectronic and Nanophotonic Devices)
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9 pages, 2713 KB  
Article
Influence of Additive N2 on O2 Plasma Ashing Process in Inductively Coupled Plasma
by Ye-Bin You, Young-Seok Lee, Si-Jun Kim, Chul-Hee Cho, In-Ho Seong, Won-Nyoung Jeong, Min-Su Choi and Shin-Jae You
Nanomaterials 2022, 12(21), 3798; https://doi.org/10.3390/nano12213798 - 27 Oct 2022
Cited by 13 | Viewed by 6884
Abstract
One of the cleaning processes in semiconductor fabrication is the ashing process using oxygen plasma, which has been normally used N2 gas as additive gas to increase the ashing rate, and it is known that the ashing rate is strongly related to [...] Read more.
One of the cleaning processes in semiconductor fabrication is the ashing process using oxygen plasma, which has been normally used N2 gas as additive gas to increase the ashing rate, and it is known that the ashing rate is strongly related to the concentration of oxygen radicals measured OES. However, by performing a comprehensive experiment of the O2 plasma ashing process in various N2/O2 mixing ratios and RF powers, our investigation revealed that the tendency of the density measured using only OES did not exactly match the ashing rate. This problematic issue can be solved by considering the plasma parameter, such as electron density. This study can suggest a method inferring the exact maximum condition of the ashing rate based on the plasma diagnostics such as OES, Langmuir probe, and cutoff probe, which might be useful for the next-generation plasma process. Full article
(This article belongs to the Special Issue Plasma-Assisted Nanofabrication)
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16 pages, 5193 KB  
Article
Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
by Myungjin Chung, Heijun Jeong, Yong-Kweon Kim, Sungjoon Lim and Chang-Wook Baek
Micromachines 2022, 13(8), 1354; https://doi.org/10.3390/mi13081354 - 20 Aug 2022
Cited by 14 | Viewed by 4414
Abstract
In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced [...] Read more.
In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced MEMS cantilever array having initial out-of-plane deflections, and the cantilevers were electrostatically actuated to generate a capacitance change. The dimensional parameters of the absorber were determined via impedance matching using a full electromagnetic simulation. The designed absorber was fabricated on a glass wafer with surface micromachining processes using a photoresist sacrificial layer and the oxygen-plasma-ashing process to release the cantilevers. The performance of the fabricated absorber was experimentally validated using a waveguide measurement setup. The absorption frequency shifted down according to the applied DC (direct current) bias voltage from 28 GHz in the initial off state to 25.5 GHz in the pull-down state with the applied voltage of 15 V. The measured reflection coefficients at those frequencies were −5.68 dB and −33.60 dB, corresponding to the peak absorptivity rates of 72.9 and 99.9%, respectively. Full article
(This article belongs to the Special Issue Design, Fabrication, Testing of MEMS/NEMS)
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10 pages, 4799 KB  
Article
Eco-Friendly In Situ ZnO Synthesis on PET Fabric Using Oxygen Plasma and Plant Waste
by Anja Verbič, Katja Brenčič, Gregor Primc, Miran Mozetič and Marija Gorjanc
Coatings 2022, 12(4), 537; https://doi.org/10.3390/coatings12040537 - 16 Apr 2022
Cited by 3 | Viewed by 2630
Abstract
This study presents an eco-friendly protocol for the hydrophilization of polyethylene terephthalate (PET) fabric and the in situ synthesis of ZnO particles. The alkaline medium and reducing agent for ZnO synthesis were prepared as aqueous extracts from wood ash and pomegranate peel, respectively. [...] Read more.
This study presents an eco-friendly protocol for the hydrophilization of polyethylene terephthalate (PET) fabric and the in situ synthesis of ZnO particles. The alkaline medium and reducing agent for ZnO synthesis were prepared as aqueous extracts from wood ash and pomegranate peel, respectively. Due to the hydrophobic nature of the PET fabric, oxygen plasma treatment was included in the process. The influence of plasma treatment in different synthesis steps on the formation of ZnO and consequently on the morphological, colour and ultraviolet (UV) protective properties of the samples was discussed. The study showed that incorporating oxygen plasma treatment before immersing the samples in each solution for the ZnO in situ synthesis (natural alkaline medium of wood ash, zinc salt and natural reducing agent from pomegranate peel) produced PET fabric with the most uniform ZnO layer without visible cracks and the highest UV-blocking ability with a UV protection factor (UPF) of 300+. The colour measurements showed that increasing the number of plasma treatments leads to higher colour strength of the samples. Herein, a novel protocol for the production of protective PET fabrics is presented, which is also an example of a completely environmentally benign textile functionalization process. Full article
(This article belongs to the Special Issue Surface Treatment of Textiles Vol. 2)
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9 pages, 4938 KB  
Article
Nanoantenna Structure with Mid-Infrared Plasmonic Niobium-Doped Titanium Oxide
by Hai Dang Ngo, Kai Chen, Ørjan S. Handegård, Anh Tung Doan, Thien Duc Ngo, Thang Duy Dao, Naoki Ikeda, Akihiko Ohi, Toshihide Nabatame and Tadaaki Nagao
Micromachines 2020, 11(1), 23; https://doi.org/10.3390/mi11010023 - 24 Dec 2019
Cited by 6 | Viewed by 4052
Abstract
Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental robustness, this is a material-of-choice for infrared plasmonics, which can substitute indium tin [...] Read more.
Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental robustness, this is a material-of-choice for infrared plasmonics, which can substitute indium tin oxide (ITO). In this report, to illustrate great advantages of this material, we describe successful fabrication and characterization of niobium doped titanium oxide nanoantenna arrays aiming at surface-enhanced infrared absorption spectroscopy. The niobium doped titanium oxide film was deposited with co-sputtering method. Then the nanopatterned arrays were prepared by electron beam lithography combined with plasma etching and oxygen plasma ashing processes. The relative transmittance of the nanostrip and nanodisk antenna arrays was evaluated with Fourier transform infrared spectroscopy. Polarization dependence of surface plasmon resonances on incident light was examined confirming good agreements with calculations. Simulated spectra also present red-shift as length, width or diameter of the nanostructures increase, as predicted by classical antenna theory. Full article
(This article belongs to the Special Issue Infrared Nanophotonics: Materials, Devices, and Applications)
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