Search Results (22)

The precise identification and non-destructive measurement of structural features and defects in semiconductor wafers are essential for ensuring process integrity and sustaining high yield in advanced manufacturing environments. Unlike conventional measurement techniques, scanning acoustic microscopy (SAM) is an advanced method that provides detailed visualizations of both surface and internal wafer structures. However, in practical industrial applications, the scanning time and image quality of SAM significantly impact its overall performance and utility. Prolonged scanning durations can lead to production bottlenecks, while suboptimal image quality can compromise the accuracy of defect detection. To address these challenges, this study proposes LinearTGAN, an improved generative adversarial network (GAN)-based model specifically designed to improve the resolution of linear acoustic wafer images acquired by the breakthrough rotary scanning acoustic microscopy (R-SAM) system. Empirical evaluations demonstrate that the proposed model significantly outperforms conventional GAN-based approaches, achieving a Peak Signal-to-Noise Ratio (PSNR) of 29.479 dB, a Structural Similarity Index Measure (SSIM) of 0.874, a Learned Perceptual Image Patch Similarity (LPIPS) of 0.095, and a Fréchet Inception Distance (FID) of 0.445. To assess the measurement aspect of LinearTGAN, a lightweight defect segmentation module was integrated and tested on annotated wafer datasets. The super-resolved images produced by LinearTGAN significantly enhanced segmentation accuracy and improved the sensitivity of microcrack detection. Furthermore, the deployment of LinearTGAN within the R-SAM system yielded a 92% improvement in scanning performance for 12-inch wafers while simultaneously enhancing image fidelity. The integration of super-resolution techniques into R-SAM significantly advances the precision, robustness, and efficiency of non-destructive measurements, highlighting their potential to have a transformative impact in semiconductor metrology and quality assurance. Full article

The calibration of Micro-Electro-Mechanical System (MEMS) microphones remains a critical challenge due to their miniaturized geometry and sensitivity to non-uniform acoustic fields. This study presents an advanced calibration methodology that integrates Finite Element Method (FEM) simulations with experimental corrections to improve the accuracy of pressure comparison calibrations using active couplers. A key innovation is the incorporation of asymmetric acoustic field analysis, which systematically quantifies and corrects discrepancies arising from cavity geometry, sensor positioning, and resonance effects peculiar of MEMS microphones. The proposed approach significantly reduces measurement uncertainties, especially in the high-frequency range above 5 kHz, where standard calibration techniques face challenges in taking into account localized pressure variations. Furthermore, the implementation of a measurement set-up, which includes the insert voltage technique, allows for an accurate assessment of the preamplifier gain and minimizes systematic errors. Experimental validation shows that the refined calibration methodology produces highly reliable correction values, ensuring a robust performance over a wide frequency range (20 Hz–20 kHz). These advances establish a rigorous framework for standardizing the calibration of MEMS microphones, strengthening their applicability in acoustic monitoring, sound source localization, and environmental sensing. Full article

Visualization of vector acoustic fields using sound intensity measurements is a very interesting field of acoustics and has numerous applications. Unfortunately, sound intensity measurement itself requires specialized measuring instruments (presure–presure (PP) or pressure–velocity (PU)-type probes). This article presents a simplified and low-cost method of sound intensity measurement based on sound pressure measurements made synchronously. This allows for the use of a single microphone and eliminates one of the main problems of the classical PP probe, which is the phase mismatch of two different microphones. The described method was used to visualize the vector acoustic field in front of an active loudspeaker. The results were compared qualitatively and quantitatively with measurements made with a commercial PU intensity probe. The results obtained showed that the proposed method has the same level of metrological accuracy. Full article

This paper emphasizes the crucial needs and reasons to ensure the reliability and repeatability of underwater acoustic measurements. As an exemplification of the aforementioned acoustic measurements challenges, the development of metrological infrastructure in the area of underwater acoustics in GUM (Central Office of Measures, Poland) is presented. An analysis of presented solutions was carried out mainly in the low frequency range, in comparison with other solutions recently developed worldwide. Moreover, factors influencing the sensitivity of hydroacoustic measuring devices are discussed. The summary of this discussion outlines the further works aimed at ensuring the reliability and repeatability of underwater acoustic measurements. The conclusions present the current state of the calibration infrastructure of underwater acoustic devices, with particular emphasis on marine ecology and fisheries sciences. Full article

The Indoor Environmental Quality (IEQ) combines thermal, visual, acoustic, and air-quality conditions in indoor environments and affects occupants’ health, well-being, and comfort. Performing continuous monitoring to assess IEQ is increasingly proving to be important, also due to the large amount of time that people spend in closed spaces. In the present study, the design, development, and metrological characterization of a low-cost multi-sensor device is presented. The device is part of a wider system, hereafter referred to as PROMET&O (PROactive Monitoring for indoor EnvironmenTal quality & cOmfort), that also includes a questionnaire for the collection of occupants’ feedback on comfort perception and a dashboard to show end users all monitored data. The PROMET&O multi-sensor monitors the quality conditions of indoor environments thanks to a set of low-cost sensors that measure air temperature, relative humidity, illuminance, sound pressure level, carbon monoxide, carbon dioxide, nitrogen dioxide, particulate matter, volatile organic compounds, and formaldehyde. The device architecture is described, and the design criteria related to measurement requirements are highlighted. Particular attention is paid to the calibration of the device to ensure the metrological traceability of the measurements. Calibration procedures, based on the comparison to reference standards and following commonly employed or ad hoc developed technical procedures, were defined and applied to the bare sensors of air temperature and relative humidity, carbon dioxide, illuminance, sound pressure level, particulate matter, and formaldehyde. The next calibration phase in the laboratory will be aimed at analyzing the mutual influences of the assembled multi-sensor hardware components and refining the calibration functions. Full article

Optoacoustics is a metrology widely used for material characterisation. In this study, a measurement setup for the selective determination of the frequency-resolved phase velocities and attenuations of longitudinal waves over a wide frequency range (3–55 $\mathrm{MHz}$) is presented. The ultrasonic waves in this setup were excited by a pulsed laser within an absorption layer in the thermoelastic regime and directed through a layer of water onto a sample. The acoustic waves were detected using a self-built adaptive interferometer with a photorefractive crystal. The instrument transmits compression waves only, is low-contact, non-destructive, and has a sample-independent excitation. The limitations of the approach were studied both by simulation and experiments to determine how the frequency range and precision can be improved. It was shown that measurements are possible for all investigated materials (silicon, silicone, aluminium, and water) and that the relative error for the phase velocity is less than 0.2%. Full article

Environmental noise control is a major health and social issue. Numerous environmental policies require local authorities to draw up noise maps to establish an inventory of the noise environment and then propose action plans to improve its quality. In general, these maps are produced using numerical simulations, which may not be sufficiently representative, for example, concerning the temporal dynamics of noise levels. Acoustic sensor measurements are also insufficient in terms of spatial coverage. More recently, an alternative approach has been proposed, consisting of using citizens as data producers by using smartphones as tools of geo-localized acoustic measurement. However, a lack of calibration of smartphones can generate a significant bias in the results obtained. Against the classical metrological principle that would aim to calibrate any sensor beforehand for physical measurement, some have proposed mass calibration procedures called “blind calibration”. The method is based on the crossing of sensors in the same area at the same time, which are therefore supposed to observe the same phenomenon (i.e., measure the same value). The multiple crossings of a large number of sensors at the scale of a territory and the analysis of the relationships between sensors allow for the calibration of the set of sensors. In this article, we propose to adapt a blind calibration method to data from the NoiseCapture smartphone application. The method’s behavior is then tested on NoiseCapture datasets for which information on the calibration values of some smartphones is already available. Full article

For acoustic roughness monitoring of the railway network at train travelling speed, new direct measurement methods are required. Common direct measurement methods need the blocking of track sections, as they are based on manually operated devices. Indirect measurement methods such as accelerometer or microphone measurements can be installed on the train, but require a conversion of the obtained measurement data to rail roughness. Optical measurement methods allow a direct measurement from the moving train, even at higher speeds, due to the contact-free nature of the measurement. This paper investigates the influence of various disturbances on the measurement result, which are expected on the train. The frequently used chord method deploying laser triangulation sensors is used. Four sensors are integrated into the setup, thus providing the possibility to combine the results from four chord methods. The measurements of the optical system are compared with a tactile measurement of METAS (Swiss Federal Institute of Metrology) on a test bench equipped with a reference rail segment. It is shown that dust and water on the rail have a significant influence in the range of small wavelengths. Displacements and tilting of the sensor array, as well as vibrations, can be compensated to a certain level by the chord method, while a single sensor is significantly disturbed. The combination of four different chord lengths and selection of the theoretically optimal method for each one-third octave band shows an improvement of the measurement result. Based on the observations made, recommendations for practical tests on the train are concluded. Full article

On-site detection and initial identification of chemical warfare agents (CWAs) remain difficult despite the many available devices designed for this type of analysis. Devices using well-established analytical techniques such as ion mobility spectrometry, gas chromatography coupled with mass spectrometry, or flame photometry, in addition to unquestionable advantages, also have some limitations (complexity, high unit cost, lack of selectivity). One of the emerging techniques of CWA detection is based on acoustic wave sensors, among which surface acoustic wave (SAW) devices and quartz crystal microbalances (QCM) are of particular importance. These devices allow for the construction of undemanding and affordable gas sensors whose selectivity, sensitivity, and other metrological parameters can be tailored by application of particular coating material. This review article presents the current state of knowledge and achievements in the field of SAW and QCM-based gas sensors used for the detection of blister agents as well as simulants of these substances. The scope of the review covers the detection of blister agents and their simulants only, as in the available literature no similar paper was found, in contrast to the detection of nerve agents. The article includes description of the principles of operation of acoustic wave sensors, a critical review of individual studies and solutions, and discusses development prospects of this analytical technique in the field of blister agent detection. Full article

Accurate ranging and real-time temperature monitoring are essential for metrology and safety in electrical conduit applications. This paper proposes an acoustic time-of-flight (TOF) estimation method based on the digital lock-in filtering (DLF) technique for conduit ranging and thermometry. The method establishes the relationship between the frequency and the time domain by applying a linear frequency modulated Chirp signal as the sound source and using the DLF technique to extract the first harmonic of the characteristic frequencies of the transmitted and received signals. Acoustic TOF estimation in the conduit is then achieved by calculating the mathematical expectation of the time difference between each characteristic frequency in the time-frequency relationship of the two signals. The experimental results with enhanced noise interference on different conduit lengths and various temperature conditions, proved that the proposed DLF method can establish a robust linear time-frequency relationship according to the characteristics of the Chirp signal, and the measurement accuracy of TOF has also been confirmed. Compared to the conventional method, the DLF method provides the lowest absolute error and standard deviation for both distance and temperature measurements with an enhanced robustness. Full article

Nitrogen-vacancy (NV) centers in diamonds play a large role in advanced quantum sensing with solid-state spins for potential miniaturized and portable application scenarios. With the temperature sensitivity of NV centers, the temperature fluctuations caused by the unknown environment and the system itself will mix with the magnetic field measurement. In this research, the temperature-sensitive characteristics of different diamonds, alongside the temperature noise generated by a measurement system, were tested and analyzed with a homemade NV magnetometer in a fiber-optic scheme. In this work, a multi-frequency synchronous manipulation method for resonating with the NV centers in all axial directions was proposed to compensate for the temperature fluctuations in a fibered NV magnetic field sensing scheme. The symmetrical features of the resonance lines of the NV centers, the common-mode fluctuations including temperature fluctuations, underwent effective compensation and elimination. The fluorescence change was reduced to 1.0% by multi-frequency synchronous manipulation from 5.5% of the single-frequency manipulation within a ±2 °C temperature range. Additionally, the multi-frequency synchronous manipulation improved the fluorescence contrast and the magnetic field measurement SNR through an omnidirectional manipulation scheme. It was very important to compensate for the temperature fluctuations, caused by both internal and external factors, to make use of the NV magnetometer in fiber-optic schemes’ practicality. This work will promote the rapid development and widespread applications of quantum sensing based on various systems and principles. Full article

Frequency combs (FCs)—spectra containing equidistant coherent peaks—have enabled researchers and engineers to measure the frequencies of complex signals with high precision, thereby revolutionising the areas of sensing, metrology and communications and also benefiting the fundamental science. Although mostly optical FCs have found widespread applications thus far, in general FCs can be generated using waves other than light. Here, we review and summarise recent achievements in the emergent field of acoustic frequency combs (AFCs), including phononic FCs and relevant acousto-optical, Brillouin light scattering and Faraday wave-based techniques that have enabled the development of phonon lasers, quantum computers and advanced vibration sensors. In particular, our discussion is centred around potential applications of AFCs in precision measurements in various physical, chemical and biological systems in conditions where using light, and hence optical FCs, faces technical and fundamental limitations, which is, for example, the case in underwater distance measurements and biomedical imaging applications. This review article will also be of interest to readers seeking a discussion of specific theoretical aspects of different classes of AFCs. To that end, we support the mainstream discussion by the results of our original analysis and numerical simulations that can be used to design the spectra of AFCs generated using oscillations of gas bubbles in liquids, vibrations of liquid drops and plasmonic enhancement of Brillouin light scattering in metal nanostructures. We also discuss the application of non-toxic room-temperature liquid–metal alloys in the field of AFC generation. Full article

Three-dimensional imaging for multi-node interferometric synthetic aperture radar (InSAR) or multi-task imaging sensors has become the prevailing trend in the field of aerial remote sensing, which requires multi-node motion information to carry out the motion compensation. A distributed position and orientation system (DPOS) can provide multi-node motion information for InSAR by transfer alignment technology. However, due to wing deformation, the relative spatial relationship between the nodes will change, which will lead to lower accuracy of the transfer alignment. As a result, the flexible baseline between the nodes affects the interferometric phase error compensation and further deteriorates the imaging quality. This paper proposes a flexible baseline measuring system based on optics, which achieves non-connect measurement and overcomes the problem that it is difficult to build an accurate wing deformation model. An accuracy test was conducted in the laboratory, and results showed that the measurement accuracy of the baseline under static and dynamic conditions was less than 0.3 mm and 0.67 mm, respectively. Full article

Nowadays, surface acoustic wave (SAW) resonators are attracting growing attention, owing to their widespread applications in various engineering fields, such as electronic, telecommunication, automotive, chemical, and biomedical engineering. A thorough assessment of SAW performance is a key task for bridging the gap between commercial SAW devices and practical applications. To contribute to the accomplishment of this crucial task, the present paper reports the findings of a new comparative study that is based on the performance evaluation of different commercial SAW resonators by using scattering (S-) parameter measurements coupled with a Lorentzian fitting and an accurate modelling technique for the straightforward extraction of a lumped-element equivalent-circuit representation. The developed investigation thus provides ease and reliability when choosing the appropriate commercial device, depending on the requirements and constraints of the given sensing application. This paper deals with the performance evaluation of commercial surface acoustic wave (SAW) resonators by means of scattering (S-) parameter measurements and an equivalent-circuit model extracted using a reliable modeling procedure. The studied devices are four TO-39 packaged two-port resonators with different nominal operating frequencies: 418.05, 423.22, 433.92, and 915 MHz. The S-parameter characterization was performed locally around the resonant frequencies of the tested SAW resonators by using an 8753ES Agilent vector network analyzer (VNA) and a home-made calibration kit. The reported measurement-based study has allowed for the development of a comprehensive and detailed comparative analysis of the performance of the investigated SAW devices. The characterization and modelling procedures are fully automated with a user-friendly graphical user interface (GUI) developed in the Python environment, thereby making the experimental analysis faster and more efficient. Full article

In this paper, the influence of the variation in transformer oil temperature on the accuracy of the all-acoustic non-iterative method for partial discharge location in a power transformer is researched. The research can improve power transformers’ testing and monitoring, particularly given the large transformer oil temperature variations during real-time monitoring. The research is based on quantifying the contribution of oil temperature to the standard combined measurement uncertainty of the non-iterative algorithm by using analytical, statistical, and Monte Carlo methods. The contribution can be quantified and controlled. The contribution varied significantly with different mutual placements of partial discharge and acoustic sensors. The correlation between the contribution and the mean distance between partial discharge and acoustic sensors was observed. Based on these findings, the procedure to quantify and control the contribution in practice was proposed. The procedure considers the specificity of the method’s mathematical model (the assumption that the oil temperature is constant), the non-iterative algorithm’s nonlinearity, and the large variations in transformer oil temperature. Existing studies did not consider the significant effect of the oil temperature on the combined measurement uncertainty of partial discharge location influenced by those phenomena. The research is limited to partial discharge located in the transformer oil. Full article