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Keywords = MEMS mirror pair

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10 pages, 1516 KB  
Article
Polymer Electrolyte-Gated Organic Electrochemical Transistors for Bioinspired Neuromorphic Computing
by Banghua Wu, Lin Gao, Yujie Peng, Changjian Liu, Canghao Xu, Haihong Guo, Yong Huang and Junsheng Yu
Chemosensors 2025, 13(12), 428; https://doi.org/10.3390/chemosensors13120428 - 9 Dec 2025
Viewed by 780
Abstract
Organic electrochemical transistors (OECTs) are compelling artificial synapses because mixed ionic–electronic coupling and transport enables low-voltage, analog weight updates that mirror biological plasticity. Here, we engineered solid-state, polymer electrolyte-gated vertical OECTs (vOECTs) and elucidate how electrolyte molecular weight influences synaptic dynamics. Using Pg2T-T [...] Read more.
Organic electrochemical transistors (OECTs) are compelling artificial synapses because mixed ionic–electronic coupling and transport enables low-voltage, analog weight updates that mirror biological plasticity. Here, we engineered solid-state, polymer electrolyte-gated vertical OECTs (vOECTs) and elucidate how electrolyte molecular weight influences synaptic dynamics. Using Pg2T-T as the redox-active channel and pDADMAC polymer electrolytes spanning low- (~100 k), medium- (~300 k), and high- (~500 k) molecular weights, cyclic voltammetry reveals reversible Pg2T-T redox, while peak separation and current density systematically track ion transport kinetics. Increasing electrolyte molecular weight enlarges the transfer curve hysteresis (memory window ΔV_mem from ~0.15 V to ~0.50 V) but suppresses on-current, consistent with slower, more confining ion motion and stabilized partially doped states. Devices exhibit rich short- and long-term plasticity: paired-pulse facilitation (A2/A1 ≈ 1.75 at Δt = 50 ms), frequency-dependent EPSCs (low-pass accumulation), cumulative potentiation, and reversible LTP/LTD. A device-aware CrossSim framework built from continuous write/erase cycles (probabilistic LUT) supports Fashion-MNIST inference with high accuracy and bounded update errors (mean −0.02; asymmetry 0.198), validating that measured nonidealities remain algorithm-compatible. These results provide a materials-level handle on polymer–ion coupling to deterministically tailor temporal learning in compact, robust neuromorphic hardware. Full article
(This article belongs to the Section Electrochemical Devices and Sensors)
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12 pages, 2778 KB  
Article
High Reflectivity, Compact, and Widely Tunable Distributed Bragg Reflector Based on Silicon-Rich SiNx-SiOy at 80 °C PECVD
by Irene Rodríguez Lamoso and Sascha Preu
Appl. Sci. 2025, 15(6), 3330; https://doi.org/10.3390/app15063330 - 18 Mar 2025
Cited by 1 | Viewed by 3978
Abstract
This study investigates the mechanical and optical characteristics of silicon nitride thin films deposited with PECVD at 80 °C for tunable silicon-rich SiNx-SiOy-based MEMS optical cavities. Varying the deposition parameters using SiH4 and N2 as precursor gases [...] Read more.
This study investigates the mechanical and optical characteristics of silicon nitride thin films deposited with PECVD at 80 °C for tunable silicon-rich SiNx-SiOy-based MEMS optical cavities. Varying the deposition parameters using SiH4 and N2 as precursor gases for silicon-rich SiNx thin films allows us to tune the refractive index to a value as high as 2.40 ± 0.013 at an extinction coefficient of only 0.008, an extremely low surface roughness of only 0.26 nm, and a compressive stress of about 150 MPa. We deposited 6.5-layer pairs of silicon-rich SiNx/SiOy-distributed Bragg reflector (DBR) micro-electro-mechanical system (MEMS) mirror that covers the whole 1300 and 1550 nm range. Cavity architectures of 6.5 top and 6 bottom layer-pairs were fabricated in the clean room providing a variety of cavity lengths between 0.615 µm and 2.85 µm. These lengths were then simulated in order to estimate the Young’s Modulus of silicon-rich SiNx, obtaining values from 56 to 92 GPa. One of the designs was characterised electro-thermally providing a tuning range of at least 86.7 nm centred at 1585 nm. The tunable filters are well suitable for implementation as tuning element in lasers for optical coherence tomography. Full article
(This article belongs to the Special Issue Interdisciplinary Approaches and Applications of Optics & Photonics)
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11 pages, 7519 KB  
Article
A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors
by Anrun Ren, Yingtao Ding, Hengzhang Yang, Teng Pan, Ziyue Zhang and Huikai Xie
Micromachines 2024, 15(8), 1017; https://doi.org/10.3390/mi15081017 - 8 Aug 2024
Cited by 2 | Viewed by 4259
Abstract
This paper presents the design, simulation, fabrication, and characterization of a novel large-scan-range electrothermal micromirror integrated with a pair of position sensors. Note that the micromirror and the sensors can be manufactured within a single MEMS process flow. Thanks to the precise control [...] Read more.
This paper presents the design, simulation, fabrication, and characterization of a novel large-scan-range electrothermal micromirror integrated with a pair of position sensors. Note that the micromirror and the sensors can be manufactured within a single MEMS process flow. Thanks to the precise control of the fabrication of the grid-based large-size Al/SiO2 bimorph actuators, the maximum piston displacement and optical scan angle of the micromirror reach 370 μm and 36° at only 6 Vdc, respectively. Furthermore, the working principle of the sensors is deeply investigated, where the motion of the micromirror is reflected by monitoring the temperature variation-induced resistance change of the thermistors on the substrate during the synchronous movement of the mirror plate and the heaters. The results show that the full-range motion of the micromirror can be recognized by the sensors with sensitivities of 0.3 mV/μm in the piston displacement sensing and 2.1 mV/° in the tip-tilt sensing, respectively. The demonstrated large-scan-range micromirror that can be monitored by position sensors has a promising prospect for the MEMS Fourier transform spectrometers (FTS) systems. Full article
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11 pages, 3259 KB  
Article
Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
by Fahu Xu, Dayong Qiao, Changfeng Xia, Xiumin Song and Yaojun He
Micromachines 2021, 12(11), 1292; https://doi.org/10.3390/mi12111292 - 21 Oct 2021
Cited by 7 | Viewed by 3935
Abstract
MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed [...] Read more.
MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system. Full article
(This article belongs to the Special Issue Optical MEMS, Volume III)
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32 pages, 5025 KB  
Article
Exact Scan Patterns of Rotational Risley Prisms Obtained with a Graphical Method: Multi-Parameter Analysis and Design
by Virgil-Florin Duma and Alexandru-Lucian Dimb
Appl. Sci. 2021, 11(18), 8451; https://doi.org/10.3390/app11188451 - 12 Sep 2021
Cited by 55 | Viewed by 7835
Abstract
Rotational Risley prisms are one of the fastest two-dimensional (2D) optomechanical scanning systems. Their drawback is the strong non-linearity of the scan patterns they produce, in contrast to the most common (but slower) raster scanning modalities of 2D dual axis galvanometer scanners (GSs) [...] Read more.
Rotational Risley prisms are one of the fastest two-dimensional (2D) optomechanical scanning systems. Their drawback is the strong non-linearity of the scan patterns they produce, in contrast to the most common (but slower) raster scanning modalities of 2D dual axis galvanometer scanners (GSs) or Micro-Electro-Mechanical Systems (MEMS) with oscillatory mirrors. The aim of this work is to develop a graphical method, which, to our knowledge, we have introduced to determine and characterize, using a commercially-available mechanical design program (for example CATIA V5R20 (Dassault Systems, Paris, France)) to simulate the exact scan patterns of rotational Risley prisms. Both the maximum and minimum angular and linear deviations of this type of scanner are deduced theoretically to characterize the outer diameter/Field-of-View (FOV) and the inner diameter (of the blind zone) of its ring-shaped patterns, respectively. This multi-parameter analysis is performed in correlation with the shape of the scan patterns, considering the four possible configurations of laser scanners with a pair of rotational Risley prisms, as well as all their parameters: prisms angles, refractive indexes, rotational speeds, distance between the two prisms, and the distance from the system to the scanned plane. Marshall’s synthetic parameters are also considered, i.e., the ratios of the rotational velocities and of the angles of the prisms. Rules-of-thumb for designing this optomechanical scanner are extracted from this analysis, regarding both shapes and dimensions of the scan patterns to be produced. An example of experimental validation completes the mathematical analysis and the performed simulations. Full article
(This article belongs to the Special Issue Recent Advances in Optomechatronics)
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19 pages, 2104 KB  
Review
On-Chip High-Finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information
by Mohammad H. Bitarafan and Ray G. DeCorby
Sensors 2017, 17(8), 1748; https://doi.org/10.3390/s17081748 - 31 Jul 2017
Cited by 61 | Viewed by 14147
Abstract
For applications in sensing and cavity-based quantum computing and metrology, open-access Fabry-Perot cavities—with an air or vacuum gap between a pair of high reflectance mirrors—offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, [...] Read more.
For applications in sensing and cavity-based quantum computing and metrology, open-access Fabry-Perot cavities—with an air or vacuum gap between a pair of high reflectance mirrors—offer important advantages compared to other types of microcavities. For example, they are inherently tunable using MEMS-based actuation strategies, and they enable atomic emitters or target analytes to be located at high field regions of the optical mode. Integration of curved-mirror Fabry-Perot cavities on chips containing electronic, optoelectronic, and optomechanical elements is a topic of emerging importance. Micro-fabrication techniques can be used to create mirrors with small radius-of-curvature, which is a prerequisite for cavities to support stable, small-volume modes. We review recent progress towards chip-based implementation of such cavities, and highlight their potential to address applications in sensing and cavity quantum electrodynamics. Full article
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Canada 2017)
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11 pages, 9305 KB  
Article
Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography
by Quentin A. A. Tanguy, Sylwester Bargiel, Huikai Xie, Nicolas Passilly, Magali Barthès, Olivier Gaiffe, Jaroslaw Rutkowski, Philippe Lutz and Christophe Gorecki
Micromachines 2017, 8(5), 146; https://doi.org/10.3390/mi8050146 - 5 May 2017
Cited by 26 | Viewed by 9727
Abstract
This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 m m in diameter. This inner mirror [...] Read more.
This paper introduces an optical 2-axis Micro Electro-Mechanical System (MEMS) micromirror actuated by a pair of electrothermal actuators and a set of passive torsion bars. The actuated element is a dual-reflective circular mirror plate of 1 m m in diameter. This inner mirror plate is connected to a rigid frame via a pair of torsion bars in two diametrically opposite ends located on the rotation axis. A pair of electrothermal bimorphs generates a force onto the perpendicular free ends of the mirror plate in the same angular direction. An array of electrothermal bimorph cantilevers deflects the rigid frame around a working angle of 45 for side-view scan. The performed scans reach large mechanical angles of 32 for the frame and 22 for the in-frame mirror. We denote three resonant main modes, pure flexion of the frame at 205 Hz , a pure torsion of the mirror plate at 1.286 kHz and coupled mode of combined flexion and torsion at 1.588 kHz . The micro device was fabricated through successive stacks of materials onto a silicon-on-insulator wafer and the patterned deposition on the back-side of the dual-reflective mirror is achieved through a dry film photoresist photolithography process. Full article
(This article belongs to the Special Issue MEMS Mirrors)
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