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Journal: Micro, 2023
Volume: 3
Number: 55
Article:
Improved Properties of Post-Deposition Annealed Ga2O3/SiC and Ga2O3/Al2O3/SiC Back-Gate Transistors Fabricated by Radio Frequency Sputtering
Authors:
by
Hee-Jae Lee, Geon-Hee Lee, Seung-Hwan Chung, Dong-Wook Byun, Michael A. Schweitz, Dae Hwan Chun, Nack Yong Joo, Minwho Lim, Tobias Erlbacher and Sang-Mo Koo
Link:
https://www.mdpi.com/2673-8023/3/4/55
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