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Journal: Eng, 2022
Volume: 3
Number: 11

Article: Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime
Authors: by Tobias Zengerle, Abdallah Ababneh and Helmut Seidel
Link: https://www.mdpi.com/2673-4117/3/1/11

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