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Journal: Eng, 2022
Volume: 3
Number: 11
Article:
Generalized Damping Model for MEMS Oscillators from Molecular to Viscous Flow Regime
Authors:
by
Tobias Zengerle, Abdallah Ababneh and Helmut Seidel
Link:
https://www.mdpi.com/2673-4117/3/1/11
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