Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency
Abstract
:1. Introduction
2. Experimental
2.1. Structure Design and Fabrication Process of the Ti/Au Multilayered Micro-Cantilever
2.2. Temperature Dependency Test
2.3. Effective Young’s Modulus by Resonance Frequency Method
2.4. FEM Simulation of the Resonance Frequency
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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Fixed-End | Single Layer | Double Layer | Triple Layer |
---|---|---|---|
Normal | 62.4 | 52.4 | 45.0 |
Block | 62.7 | 57.4 | 48.0 |
Bridge | 63.3 | 58.0 | 49.5 |
Fixed-End | Single Layer |
---|---|
Normal | 68.1 GPa |
Block | 69.4 GPa |
Bridge | 69.4 GPa |
Fixed-End | 150 °C | 200 °C | 250 °C | 300 °C |
---|---|---|---|---|
Normal | 62.3 | 62.3 | 62.3 | 62.5 |
Block | 62.9 | 63.0 | 63.1 | 63.3 |
Bridge | 65.1 | 65.1 | 65.3 | 65.5 |
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Watanabe, H.; Chang, T.-F.M.; Schneider, M.; Schmid, U.; Chen, C.-Y.; Iida, S.; Yamane, D.; Ito, H.; Machida, K.; Masu, K.; et al. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem 2021, 2, 216-223. https://doi.org/10.3390/electrochem2020015
Watanabe H, Chang T-FM, Schneider M, Schmid U, Chen C-Y, Iida S, Yamane D, Ito H, Machida K, Masu K, et al. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem. 2021; 2(2):216-223. https://doi.org/10.3390/electrochem2020015
Chicago/Turabian StyleWatanabe, Hitomi, Tso-Fu Mark Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, and et al. 2021. "Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency" Electrochem 2, no. 2: 216-223. https://doi.org/10.3390/electrochem2020015