Influence of System and Actuator Nonlinearities on the Dynamics of Ring-Type MEMS Gyroscopes
Abstract
:1. Introduction
2. Governing Equations
3. Development of Nonlinear Electrostatic Force Model for MEMS Ring-Based Gyroscope
4. Results and Discussion
4.1. Natural Frequency Variation
4.2. Time Response
5. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
Appendix A
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Gebrel, I.F.; Asokanthan, S.F. Influence of System and Actuator Nonlinearities on the Dynamics of Ring-Type MEMS Gyroscopes. Vibration 2021, 4, 805-821. https://doi.org/10.3390/vibration4040045
Gebrel IF, Asokanthan SF. Influence of System and Actuator Nonlinearities on the Dynamics of Ring-Type MEMS Gyroscopes. Vibration. 2021; 4(4):805-821. https://doi.org/10.3390/vibration4040045
Chicago/Turabian StyleGebrel, Ibrahim F., and Samuel F. Asokanthan. 2021. "Influence of System and Actuator Nonlinearities on the Dynamics of Ring-Type MEMS Gyroscopes" Vibration 4, no. 4: 805-821. https://doi.org/10.3390/vibration4040045