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Journal: Plasma, 2022
Volume: 5
Number: 23
Article:
Chamber with Inverted Electrode Geometry for Measuring and Control of Ion Flux-Energy Distribution Functions
Authors:
by
Christian Schulze, He Li, Leonie Mohn, Martin Müller and Jan Benedikt
Link:
https://www.mdpi.com/2571-6182/5/3/23
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