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Proceedings 2018, 2(13), 988; https://doi.org/10.3390/proceedings2130988

Fast Humidity Sensors for Harsh Environment

1
Institute of Electronic Sensor Systems, Graz University of Technology, 8010 Graz, Austria
2
Institute of Solid State Physics, Graz University of Technology, 8010 Graz, Austria
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Author to whom correspondence should be addressed.
Published: 6 December 2018
PDF [862 KB, uploaded 6 December 2018]

Abstract

With the application of a recently developed deposition method called initiated chemical vapor deposition (iCVD), remarkably fast responsive hydrogel thin films in the order of a few hundred nanometers were created. When in contact with humid air, the hydrogel layer extends its thickness manifold, which can be detected. The verification of the thickness change was realized interferometrically with a laser and a white light input source in two different implementations. The setup was designed without electric components in the vicinity of the active sensor layer and is therefore applicable in harsh and explosive environment. The achieved response time for an abrupt change of the humidity τ63 ≤ 2.5 s is about three times lower compared to one of the fastest commercially available sensors on the market.
Keywords: humidity measurement; polymer; hydrogel; thin film; initial chemical vapor deposition; iCVD; thin film thickness; laser interference; spectral reflectance; Flory-Huggins theory humidity measurement; polymer; hydrogel; thin film; initial chemical vapor deposition; iCVD; thin film thickness; laser interference; spectral reflectance; Flory-Huggins theory
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Buchberger, A.; Coclite, A.M.; Bergmann, A. Fast Humidity Sensors for Harsh Environment. Proceedings 2018, 2, 988.

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