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A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB R3T 2N2, Canada
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Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
Proceedings 2018, 2(13), 938; https://doi.org/10.3390/proceedings2130938
Published: 17 December 2018
(This article belongs to the Proceedings of EUROSENSORS 2018)
A 3 Degree-of-Freedom (DOF) MEMS mirror is presented which can direct the light beam on an objective point and also operate in a continuous resonance 2 DOF mode. The micro-mirror is actuated by Lorentz force and has 4 actuators embedded in 4 sides of a square mirror. By enabling the actuators, different types of tilting and linear motion can be achieved. The micro-mirror is able to work in either static mode by applying dc current or dynamic mode by applying an ac current at the mirror resonance frequency. The mirror showed a maximum tilt angle of 14.5° and 20° for an input rms power of 2 mW in the resonance mode. A linear motion of 200 µm was achieved by 65 mW of dc power.
Keywords: MEMS mirror; Lorentz force actuation; scanning micro-mirror; 3 degrees of freedom MEMS mirror; Lorentz force actuation; scanning micro-mirror; 3 degrees of freedom
MDPI and ACS Style

Afsharipour, E.; Park, B.; Soltanzadeh, R.; Shafai, C. A 3-Degree-of-Freedom MEMS Mirror with Controllable Static and Dynamic Motion for Beam Steering. Proceedings 2018, 2, 938.

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