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Journal: Proceedings, 2018
Volume: 2
Number: 912
Article:
A Novel Bi-Stable MEMS Membrane Concept Based on a Piezoelectric Thin Film Actuator for Integrated Switching
Authors:
by
Manuel Dorfmeister, Bernhard Kössl, Michael Schneider and Ulrich Schmid
Link:
https://www.mdpi.com/2504-3900/2/13/912
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