Next Article in Journal
A Novel Modular eNose System Based on Commercial MOX Sensors to Detect Low Concentrations of VOCs for Breath Gas Analysis
Previous Article in Journal
Epitaxial Graphene Sensors Combined with 3D Printed Microfluidic Chip for Heavy Metals Detection
Article Menu
Issue 13 (Eurosensors 2018) cover image

Export Article

Open AccessProceedings
Proceedings 2018, 2(13), 796; https://doi.org/10.3390/proceedings2130796

Sensitivity Comparison of Integrated Mid-Infrared Silicon-Based Photonic Detectors

1
CTR Carinthian Tech Research AG, 9524 Villach, Austria
2
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, 4040 Linz, Austria
3
Infineon Technologies Austria AG, 9500 Villach, Austria
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Author to whom correspondence should be addressed.
Published: 30 November 2018
(This article belongs to the Proceedings of Eurosensors 2018)
PDF [483 KB, uploaded 30 November 2018]

Abstract

Integrated silicon photonics in the mid-infrared is a promising platform for cheap and miniaturized chemical sensors, including gas and/or liquid sensors for environmental monitoring and the consumer electronics market. One major challenge in integrated photonics is the design of an integrated detector sensitive enough to detect minimal changes in light intensity resulting from, for example, the absorption by the analyte. Further complexity arises from the need to fabricate such detectors at a high throughput with high requirements on fabrication tolerances. Here we analyze and compare the sensitivity of three different chip-integrated detectors at a wavelength of 4.17 µm, namely a resistance temperature detector (RTD), a diode and a vertical-cavity enhanced resonant detector (VERD).
Keywords: silicon photonics; mid-infrared detectors; cavity-enhanced resonant detector; integrated photonics silicon photonics; mid-infrared detectors; cavity-enhanced resonant detector; integrated photonics
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
SciFeed

Share & Cite This Article

MDPI and ACS Style

Consani, C.; Söllradl, T.; Ranacher, C.; Tortschanoff, A.; Rauter, L.; Pühringer, G.; Grille, T.; Irsigler, P.; Jakoby, B. Sensitivity Comparison of Integrated Mid-Infrared Silicon-Based Photonic Detectors. Proceedings 2018, 2, 796.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top