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Proceedings 2018, 2(13), 1508; https://doi.org/10.3390/proceedings2131508

Enhanced Sensing Performance of Integrated Gas Sensor Devices

1
Institute for Microelectronics, TU Wien, 1040 Vienna, Austria
2
STMicroelectronics Pte Ltd., Singapore 569508, Singapore
Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.
*
Author to whom correspondence should be addressed.
Published: 7 December 2018
PDF [620 KB, uploaded 7 December 2018]

Abstract

Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported.
Keywords: semiconducting metal oxide; gas sensor; microheater; electo-thermal simulation semiconducting metal oxide; gas sensor; microheater; electo-thermal simulation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Lahlalia, A.; Neel, O.L.; Shankar, R.; Selberherr, S.; Filipovic, L. Enhanced Sensing Performance of Integrated Gas Sensor Devices. Proceedings 2018, 2, 1508.

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