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Keywords = electo-thermal simulation

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5 pages, 620 KiB  
Proceeding Paper
Enhanced Sensing Performance of Integrated Gas Sensor Devices
by Ayoub Lahlalia, Olivier Le Neel, Ravi Shankar, Siegfried Selberherr and Lado Filipovic
Proceedings 2018, 2(13), 1508; https://doi.org/10.3390/proceedings2131508 - 7 Dec 2018
Cited by 2 | Viewed by 2252
Abstract
Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. [...] Read more.
Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported. Full article
(This article belongs to the Proceedings of EUROSENSORS 2018)
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