Design, Fabrication and Testing of the First 3D-Printed and Wet Metallized z-Axis Accelerometer†
AbstractIn this work the design, fabrication and testing of the first 3D-printed and wet metallized capacitive z-axis accelerometer with a volume of 3.4 cm × 8 mm × 2.5 mm is presented. Preliminary results well match the modelling, both in terms of electromechanical parameters and of measured sensitivity, thus validating the proposed concept and fabrication process. With a spring thickness of 300 µm and a gap size of 200 µm for capacitive read-out, the presented device and the shown results can be considered as the first step toward 3D-printed MEMS (Micro-Electro-Mechanical Systems) inertial sensors.
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Credi, C.; Zega, V.; Bernasconi, R.; Langfelder, G.; Cigada, A.; Magagnin, L.; Levi, M.; Corigliano, A. Design, Fabrication and Testing of the First 3D-Printed and Wet Metallized z-Axis Accelerometer. Proceedings 2017, 1, 614.
Credi C, Zega V, Bernasconi R, Langfelder G, Cigada A, Magagnin L, Levi M, Corigliano A. Design, Fabrication and Testing of the First 3D-Printed and Wet Metallized z-Axis Accelerometer. Proceedings. 2017; 1(4):614.Chicago/Turabian Style
Credi, Caterina; Zega, Valentina; Bernasconi, Roberto; Langfelder, Giacomo; Cigada, Alfredo; Magagnin, Luca; Levi, Marinella; Corigliano, Alberto. 2017. "Design, Fabrication and Testing of the First 3D-Printed and Wet Metallized z-Axis Accelerometer." Proceedings 1, no. 4: 614.
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