Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire †
Abstract
:1. Introduction
2. Experimental Details
3. Results
4. Conclusions
Acknowledgments
Conflicts of Interest
References
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Gillinger, M.; Knobloch, T.; Schneider, M.; Schmid, U. Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire. Proceedings 2017, 1, 341. https://doi.org/10.3390/proceedings1040341
Gillinger M, Knobloch T, Schneider M, Schmid U. Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire. Proceedings. 2017; 1(4):341. https://doi.org/10.3390/proceedings1040341
Chicago/Turabian StyleGillinger, Manuel, Theresia Knobloch, Michael Schneider, and Ulrich Schmid. 2017. "Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire" Proceedings 1, no. 4: 341. https://doi.org/10.3390/proceedings1040341
APA StyleGillinger, M., Knobloch, T., Schneider, M., & Schmid, U. (2017). Harsh Environmental Surface Acoustic Wave Temperature Sensor Based on Pure and Scandium doped Aluminum Nitride on Sapphire. Proceedings, 1(4), 341. https://doi.org/10.3390/proceedings1040341