Bertke, M.; Reinheimer, U.W.; Fahrbach, M.; Hamdana, G.; Wasisto, H.S.; Peiner, E.
Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries. Proceedings 2017, 1, 371.
https://doi.org/10.3390/proceedings1040371
AMA Style
Bertke M, Reinheimer UW, Fahrbach M, Hamdana G, Wasisto HS, Peiner E.
Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries. Proceedings. 2017; 1(4):371.
https://doi.org/10.3390/proceedings1040371
Chicago/Turabian Style
Bertke, Maik, Uili Wobeto Reinheimer, Michael Fahrbach, Gerry Hamdana, Hutomo Suryo Wasisto, and Erwin Peiner.
2017. "Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries" Proceedings 1, no. 4: 371.
https://doi.org/10.3390/proceedings1040371
APA Style
Bertke, M., Reinheimer, U. W., Fahrbach, M., Hamdana, G., Wasisto, H. S., & Peiner, E.
(2017). Piezo Resistive Read-Out Contact Resonance Spectroscopy for Material and Layer Analysis at High-Aspect-Ratio Geometries. Proceedings, 1(4), 371.
https://doi.org/10.3390/proceedings1040371
