Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope†
AbstractThis paper proposes a stiffness correction method to improve the resilience to vibration of a dual-mass MEMS gyroscope with a particular focus near the resonance frequency of the anti-phase drive mode (fDa), i.e., its operational mode. Because of its balanced shape, this operating mode is ideally insensitive to vibrations. However, fabrication imperfections generates a residual sensitivity to parasitic vibrations that can disturb normal operation of the sensor. This work shows that the application of a DC voltage (Vtr) at the drive actuation electrode enables to decrease this sensitivity by a factor of at least 30 because of the stiffness tuning of the dual-mass structure. Experiments are performed to confirm this assumption and an efficient stiffness correction method is proposed to improve device operation.
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Janioud, P.; Koumela, A.; Poulain, C.; Rey, P.; Berthelot, A.; Morfouli, P.; Jourdan, G. Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope. Proceedings 2017, 1, 355.
Janioud P, Koumela A, Poulain C, Rey P, Berthelot A, Morfouli P, Jourdan G. Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope. Proceedings. 2017; 1(4):355.Chicago/Turabian Style
Janioud, Pierre; Koumela, Alexandra; Poulain, Christophe; Rey, Patrice; Berthelot, Audrey; Morfouli, Panagiota; Jourdan, Guillaume. 2017. "Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope." Proceedings 1, no. 4: 355.
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