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Proceedings 2017, 1(4), 355;

Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope

University Grenoble Alpes, Grenoble F-38000, France
CEA, LETI, MINATEC Campus, Grenoble F-38054, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [1261 KB, uploaded 27 August 2017]


This paper proposes a stiffness correction method to improve the resilience to vibration of a dual-mass MEMS gyroscope with a particular focus near the resonance frequency of the anti-phase drive mode (fDa), i.e., its operational mode. Because of its balanced shape, this operating mode is ideally insensitive to vibrations. However, fabrication imperfections generates a residual sensitivity to parasitic vibrations that can disturb normal operation of the sensor. This work shows that the application of a DC voltage (Vtr) at the drive actuation electrode enables to decrease this sensitivity by a factor of at least 30 because of the stiffness tuning of the dual-mass structure. Experiments are performed to confirm this assumption and an efficient stiffness correction method is proposed to improve device operation.
Keywords: MEMS; gyroscope; anti-phase mode; mechanical vibration; stiffness correction MEMS; gyroscope; anti-phase mode; mechanical vibration; stiffness correction
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Janioud, P.; Koumela, A.; Poulain, C.; Rey, P.; Berthelot, A.; Morfouli, P.; Jourdan, G. Tuning the Anti-Phase Mode Sensitivity to Vibrations of a MEMS Gyroscope. Proceedings 2017, 1, 355.

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