Abstract

Silicon nanowires (SiNWs) based resistors used as bacteria sensors are fabricated using the classical silicon technologies. SiNWs are grown by vapor liquid solid (VLS) method using gold as catalyst. Electrodes of the device are made of heavily in-situ doped polycristalline silicon. Results show potential use of the corresponding resistors, with SiNWs as sensitive units, for bacteria detection. Bacteria are preferentially hanged into SiNWs array and electrical resistance of the device decreases due to the presence of bacteria. Such resistors are promising bacteria sensors to monitor contamination in controlled environment for hygiene, fabricated in a simple and low-cost fabrication technology.