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Proceedings 2017, 1(4), 294;

VO2: A Phase Change Material for Micromechanics

Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
Physics Department, University of Genova, 16146 Genova, Italy
CNR-SPIN, 16152 Genova, Italy
Institute of Scientific and Industrial Research, Osaka University, 567-0047 Osaka, Japan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 11 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
PDF [588 KB, uploaded 11 October 2017]


Micro- and nano-mechanical systems may take advantage from using materials having multiple functional characteristics. VO2 is a compound characterised by a solid state phase transition (SSPT) just above room temperature, consisting in a concurrent metal-insulator transition and a change of lattice symmetry and parameters. Here, the combination of non-linear electrical response and structural changes is employed to realise a novel high-frequency mechanical actuation scheme, showing direct conversion from DC voltage to mechanical excitation in the MHz range and selective activation of the different mechanical modes of a microstructure.
Keywords: mechanical oscillators; Vanadium dioxide; MEMS mechanical oscillators; Vanadium dioxide; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Manca, N.; Pellegrino, L.; Kanki, T.; Venstra, W.J.; Mattoni, G.; Higuchi, Y.; Tanaka, H.; Caviglia, A.D.; Marré, D. VO2: A Phase Change Material for Micromechanics. Proceedings 2017, 1, 294.

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