VO2: A Phase Change Material for Micromechanics†
AbstractMicro- and nano-mechanical systems may take advantage from using materials having multiple functional characteristics. VO2 is a compound characterised by a solid state phase transition (SSPT) just above room temperature, consisting in a concurrent metal-insulator transition and a change of lattice symmetry and parameters. Here, the combination of non-linear electrical response and structural changes is employed to realise a novel high-frequency mechanical actuation scheme, showing direct conversion from DC voltage to mechanical excitation in the MHz range and selective activation of the different mechanical modes of a microstructure.
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Manca, N.; Pellegrino, L.; Kanki, T.; Venstra, W.J.; Mattoni, G.; Higuchi, Y.; Tanaka, H.; Caviglia, A.D.; Marré, D. VO2: A Phase Change Material for Micromechanics. Proceedings 2017, 1, 294.
Manca N, Pellegrino L, Kanki T, Venstra WJ, Mattoni G, Higuchi Y, Tanaka H, Caviglia AD, Marré D. VO2: A Phase Change Material for Micromechanics. Proceedings. 2017; 1(4):294.Chicago/Turabian Style
Manca, Nicola; Pellegrino, Luca; Kanki, Teruo; Venstra, Warner J.; Mattoni, Giordano; Higuchi, Yoshiyuki; Tanaka, Hidekazu; Caviglia, Andrea D.; Marré, Daniele. 2017. "VO2: A Phase Change Material for Micromechanics." Proceedings 1, no. 4: 294.
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