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Impact of Surface Roughness on Ion-Surface Interactions Studied with Energetic Carbon Ions 13C+ on Tungsten Surfaces

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Independent researchers, Heinersdorfer Str. 52, 13086 Berlin, Germany
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Forschungszentrum Jülich GmbH, Institut für Energie—und Klimaforschung—Plasmaphysik, 52428 Jülich, Germany
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Max-Planck-Institut für Plasmaphysik, Boltzmannstraße 2, 85748 Garching, Germany
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Institut für Physikalische Chemie, RWTH Aachen University, Landoltweg 2, 52074 Aachen, Germany
*
Author to whom correspondence should be addressed.
Condens. Matter 2019, 4(1), 29; https://doi.org/10.3390/condmat4010029
Received: 12 January 2019 / Revised: 23 February 2019 / Accepted: 25 February 2019 / Published: 5 March 2019
The effect of surface roughness on angular distributions of reflected and physically sputtered particles is investigated by ultra-high vacuum (UHV) ion-surface interaction experiments. For this purpose, a smooth (Ra = 5.9 nm) and a rough (Ra = 20.5 nm) tungsten (W) surface were bombarded with carbon ions 13C+ under incidence angles of 30° and 80°. Reflected and sputtered particles were collected on foils to measure the resulting angular distribution as a function of surface morphology. For the qualitative and quantitative analysis, secondary ion mass spectrometry (SIMS) and nuclear reaction analysis (NRA) were performed. Simulations of ion-surface interactions were carried out with the SDTrimSP (Static Dynamic Transport of Ions in Matter Sputtering) code. For rough surfaces, a special routine was derived and implemented. Experimental as well as calculated results prove a significant impact of surface roughness on the angular distribution of reflected and sputtered particles. It is demonstrated that the effective sticking of C on W is a function of the angle of incidence and surface morphology. It is found that the predominant ion-surface interaction process changes with fluence. View Full-Text
Keywords: roughness; ion-surface interaction; angular distribution; reflection; physical sputtering; deposition; sticking; plasma-wall interaction; secondary ion mass spectrometry; nuclear reaction analysis; SDTrimSP roughness; ion-surface interaction; angular distribution; reflection; physical sputtering; deposition; sticking; plasma-wall interaction; secondary ion mass spectrometry; nuclear reaction analysis; SDTrimSP
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Hellwig, M.; Köppen, M.; Hiller, A.; Koslowski, H.R.; Litnovsky, A.; Schmid, K.; Schwab, C.; De Souza, R.A. Impact of Surface Roughness on Ion-Surface Interactions Studied with Energetic Carbon Ions 13C+ on Tungsten Surfaces. Condens. Matter 2019, 4, 29.

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