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Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization

1
Surface Design Engineering Laboratory, SIT, 3-15-10 Minami-Rokugo, Ota-City, Tokyo 144-0045, Japan
2
MicroTeX Labs, llc., Ota, Tokyo 144-0045, Japan
3
Thermo-graphitics, Co. Ltd., Osaka 551-0031, Japan
*
Author to whom correspondence should be addressed.
Received: 18 December 2018 / Revised: 22 February 2019 / Accepted: 26 February 2019 / Published: 11 March 2019
(This article belongs to the Special Issue Plasma Processing for Carbon-based Materials)
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Abstract

A diamond-like carbon (DLC) film, coated on a AISI420-J2 stainless steel substrate and vertically aligned graphite (VAG), was structured by high-density plasma oxidation to work as a DLC-punch for micro-stamping and DLC-nozzle array for micro-dispensing, in addition to acting as a copper-plated thermal spreader, respectively. Thick DLC films were micro-patterned by maskless lithography and directly plasma-etched to remove the unmasked regions. Thick VAG (Ca plates were micro-patterned by screen-printing and selectively etched to activate the surface. Raman spectroscopy as well as electric resistivity measurement proved that there was no degradation of VAG by this surface activation. Wet plating was utilized to prove that copper wettability was improved by this surface treatment. View Full-Text
Keywords: DLC-nozzle; DLC-punch array; vertically aligned graphite; surface-activated graphite; copper wet-plating DLC-nozzle; DLC-punch array; vertically aligned graphite; surface-activated graphite; copper wet-plating
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Aizawa, T.; Wasa, K.; Nogami, Y. Plasma Oxidation Printing into DLC and Graphite for Surface Functionalization. C 2019, 5, 11.

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