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Journal: Inorganics, 2025
Volume: 13
Number: 80

Article: Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma
Authors: by Roman Kornev, Georgy Mochalov, Nikita Maleev, Sergei Romanov, Konstantin Kornev and Alexandra Kalinina
Link: https://www.mdpi.com/2304-6740/13/3/80

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