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Journal: Photonics, 2022
Volume: 9
Number: 911

Article: Research on a MEMS Microparticles Vacuum Chamber for Optical Levitation with a Built-In Vacuum Gauge
Authors: by Junji Pu, Kai Zeng, Yulie Wu and Dingbang Xiao
Link: https://www.mdpi.com/2304-6732/9/12/911

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