Development of Micron Sized Photonic Devices Based on Deep GaN Etching
Abstract
:1. Introduction
2. Experimental Details
3. Results and Discussion
4. Conclusions
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Dogheche, K.; Alshehri, B.; Patriache, G.; Dogheche, E. Development of Micron Sized Photonic Devices Based on Deep GaN Etching. Photonics 2021, 8, 68. https://doi.org/10.3390/photonics8030068
Dogheche K, Alshehri B, Patriache G, Dogheche E. Development of Micron Sized Photonic Devices Based on Deep GaN Etching. Photonics. 2021; 8(3):68. https://doi.org/10.3390/photonics8030068
Chicago/Turabian StyleDogheche, Karim, Bandar Alshehri, Galles Patriache, and Elhadj Dogheche. 2021. "Development of Micron Sized Photonic Devices Based on Deep GaN Etching" Photonics 8, no. 3: 68. https://doi.org/10.3390/photonics8030068