A laser tracer should work in an ideal working environment at 20 °C so as to guarantee its measurement accuracy. However, the ambient temperature is affected by thermal expansion/contraction, gravity, and buoyancy. Even external devices, such as air conditioners, are used to control the ambient temperature to realize a uniform temperature distribution.
2.1. Effect of Temperature on Laser Interferometric Ranging
The distance measurement principle of laser tracers is based on laser interferometric ranging. Laser tracers are highly accurate. Although the wavelength emitted by the laser itself cannot affected by small changes in the operating environment, environmental conditions (temperature, humidity, air pressure, etc.), especially changes in the refractive index of the air, affect the propagation of the laser through the medium. Interference patterns or fringes can be affected by a temperature variation, which in turn affects the accuracy of interferometric measurements. The CMM workspace is nonideal and variable. Therefore, the performance of environmental compensation systems is particularly important. In current environmental compensation systems, the temperature, humidity, and air pressure measurements obtained using a single sensor are directly used as environmental parameters. The actual workshop environment is complex and variable, and the temperature distribution in the CMM workspace is non-uniform and varies with time. Therefore, when a laser tracer is used for multi-station measurements, the optical path of the laser tracer propagates across the temperature gradient, and the influence of the refractive index on the wavelength cannot be ignored [
20].
The coordinates of any point in the CMM workspace are set to
Ai(
xi,
yi,
zi),
i = 1, 2, 3, …,
n. The temperature at this point is
Ti. Then, the refractive index of air at point
Ai is expressed as follows [
21]:
where
ns is the refractive index of air in the standard state, and
P is the ambient pressure. When only the effect of the temperature change on the refractive index is considered, the change in the refractive index can be expressed as follows:
According to the actual working environment, the Edlén equation is used to calculate the standard refractive index,
ns = 1.0002765. In the vicinity of the normal state (air pressure
P = 101,325 Pa; temperature
T = 20 °C; relative humidity
h = 50%), Equation (2) can be simplified:
When only the effect of the temperature change on the wavelength is considered, the change in wavelength can be expressed as follows:
The laser-tracer ranging equation can also be simplified:
where
λ is the wavelength of laser propagation in the medium, and
N is the value of the stripe count. When only the effect of temperature change on laser interferometric ranging is considered, the change in laser interferometric ranging can be expressed:
2.2. Non-Uniform-Temperature Field Model Based on RBF Neural Network
The laser-tracer multi-station measurement system facilitates the error measurement of a large-scale CMM. The CMM workspace is large, and the spatial distribution of the temperature is uneven. In addition, an overall synchronized temporal temperature variation caused by temperature and other effects also exists. The CMM is a precision measurement instrument, and its measurement process involves motion along three axes. However, it is difficult to arrange multiple fixed-temperature sensors in the measurement space. Therefore, in the study of non-uniform-temperature fields in the CMM workspace, it is necessary to predict the temperature in the workspace. Based on an RBF neural network, a model of the non-uniform-temperature field in the CMM measurement space was developed in this study. Compared to complex mathematical models, the RBF neural network can more efficiently and conveniently estimate the temperature at any point in space.
The RBF neural network-based non-uniform-temperature field model of the CMM measurement space established in this study is shown in
Figure 2. The network is composed of three layers: input, hidden, and output. For a non-uniform-temperature field at a certain time, the parameters (
xi,
yi, and
zi) of the input layer are the 3D coordinates of any point
Ai in the CMM workspace. The parameters
xi,
yi,
zi, and
ti of the input layer are the 3D coordinates of
Ai and time data. The radial basis function activation function used in this study is the Gaussian function [
22]. Let
Xi be the RBF input sample vector. The activation function
φ(
Xi,
cj) of the hidden layer neurons is given by the Gaussian function, which is defined as follows:
where
cj is the central vector of the basis function, referring to the center position of the radial basis function in the input space;
δj is the width vector of the basis function, referring to the magnitude of the width of the radial basis function;
Xi is the
i-th input vector (
Xi(
xi,
yi, z
i) or
Xi(
xi,
yi,
zi,
ti)); and the output layer
Ti is a temperature or temperature-dependent function that is equal to the linear combination of the RBF output as the basis function:
where
ωj is the connection weight between the hidden and output layers. The implementation steps are as follows. First, the weights, center vector, and width vector are initialized. Second, the output value of the hidden layer is calculated. Subsequently, the value of the output layer is calculated. Next, the mean squared error is calculated. Finally, the initial parameters are updated using the gradient descent method.
By comparing the output layer values, which are calculated after introducing the initialized parameters, with the target values, the loss function is represented by the mean squared error:
where
Ti(
Xi) is the output temperature calculated from the input of the
i-th sample;
Ti is the target output temperature corresponding to the input of the
i-th sample.
2.3. Laser-Tracing Multi-Station Measurement Model with Temperature Compensation
A multi-station measurement model based on a single laser tracer was established using a redundant measurement method. The laser tracer was placed at different positions on the CMM measurement platform in a time-shifted manner. The cat’s eye reflector was moved together with the CMM probe, as shown in
Figure 3. The laser from the laser tracer was reflected by the cat’s eye and then reflected by the standard sphere fixed inside the laser tracer as the measurement beam, thus interfering with the reference beam. In this manner, the tracking and ranging of the laser tracer were realized. The multi-station measurement experimental device of laser tracer is shown in the
Figure 4.
It was assumed that a laser tracer was used to measure
n planned measurement points in the CMM measurement space at
m stations. The coordinates of the
n measurement points are
Ai(
xi, yi, zi)
, i = 1, 2, 3, …,
n. The station coordinates of the laser tracer are
Pj(
Xj, Yj, Zj)
, j = 1, 2, 3, …,
m. The redundant error of the laser tracer is
dj. The relative interference length of the cat’s eye reflector during the measurement process is
lij. The distance between two points in 3D space is expressed in [
23] as follows:
The working principle of a laser tracer is interferometry. The reference beam interferes with the measurement beam, and the counting stripe varies with the movement of the cat’s eye. The measurement distance equation for a laser tracer is expressed as follows:
where
λ0 is the laser wavelength in the standard environment, and
nair is the air refractive index in the actual environment.
At time ti, the cat’s eye moves with the CMM to measurement point Ai(xi, yi, zi), and the temperature at point Ai is Ti. The refractive index of the air at Ai is expressed by Equation (1).
If the laser path is subdivided into
p segments, as shown in
Figure 5, the air refractive index of each path is
nk,
k = 1, 2, …,
p; the temperature field at moment
ti can be derived from the RBF model described by
nk as follows:
Then, the interferometric length value
lij′ after temperature compensation can be expressed:
In previous laser-tracing multi-station measurement methods, the influence of the non-uniform-temperature field was usually ignored, and the refractive index was believed to be a fixed value throughout the measurement optical path of laser interferometry. Thus, the refractive index in the measurement range was
nu. Then, the distance measurement value can be expressed as follows:
The ratio of the laser interferometric lengths obtained before and after the compensation temperature
rij is thus expressed:
Therefore, the laser interferometric ranging error caused by neglecting the influence of the non-uniform-temperature field in the CMM workspace can be expressed as e = lij ·(rij·1).
After substituting lij′ into the laser-tracing multi-station measurement model, the coordinates of the laser-tracer stations and the actual coordinates of the measurement point after temperature compensation can be obtained. Finally, the CMM volumetric error measurement results are obtained after temperature compensation.
To solve the coordinates of laser tracer’s station
Pj (
Xj,
Yj,
Zj) and the redundant error
dj of the laser tracer, the objective function of the nonlinear least-squares problem is obtained using the laser-tracer multi-station measurement model as follows:
Using the Levenberg–Marquardt (L–M) algorithm, self-calibration of the laser-tracer station was performed to calibrate the coordinates of the laser-tracer station Pj (Xj, Yj, Zj) and the redundant error dj of the laser tracer.
Similarly, taking the station coordinates and redundant error obtained above as the known conditions, the actual values of the measurement points
Ai(
xi,
yi,
zi),
Ai’(
xi’,
yi’,
zi’) can be solved using the laser-tracking multi-station measurement model and the L–M algorithm. According to the equation for the distance between two points in the laser-tracing multi-station measurement system (Equation (10)), the objective equation of the L–M algorithm is expressed as follows:
Ideally, the CMM should move to the measurement point with the theoretical coordinates
Ai(
xi, yi, zi). However, under the influence of manufacturing, installation, elastic deformation, and thermal deformation of the CMM, the volumetric error and the difference between the actual coordinates
Ai’(
xi’, yi’, zi’) and the theoretical coordinates
Ai(
xi,
yi,
zi) of the CMM measurement point can be expressed as follows:
The relationship between the volumetric and geometric errors is established using a quasi-rigid body model [
24]. Then, a system of objective equations containing known volumetric errors is obtained to solve these geometric errors. Subsequently, 21 geometric error terms of the CMM are solved using the elastic network algorithm and QR decomposition method.
For CMMs with different structures and motion modes, a total of 24 different quasi-rigid body models are available. In this study, using an FXYZ-type CMM as an example, a quasi-rigid body model is established as follows:
where
A1(
xp,
yp,
zp) are the coordinates of the initial point to be measured; (
x,
y,
z) is the displacement of CMM relative to the initial point; (Δ
x, Δ
y, Δ
z) is the volumetric error of the point to be measured;
δx(
x) is the
x-axis positioning error;
δy(
x) and
δz(
x) are the
x-axis straightness motion errors;
εx(
x),
εy(
x), and
εz(
x) are the
x-axis angular motion errors;
δy(
y) is the
y-axis positioning error;
δx(
y) and
δz(
y) are the
y-axis straightness motion errors;
εx(
y),
εy(
y), and
εz(
y) are the
y-axis angular motion errors;
δz(
z) is the
z-axis positioning error;
δx(
z) and
δy(
z) are the
z-axis straightness motion errors;
εx(
z),
εy(
z), and
εz(
z) are the
z-axis angular motion errors; and
αxy,
αxz, and
αyz are verticality errors.
According to the quasi-rigid body model above, the system of equations between the volumetric and geometric errors is established with the number of points to be measured and the number of errors. Let the displacement from any point
A1(
xp,
yp,
zp) to the first point
A1(
xp,
yp,
zp) in the CMM measurement space be
xi1 =
xi −
xp,
yi1 =
yi −
yp, and
zi1 =
zi −
zp. Substituting the displacement into the quasi-rigid body model of the CMM (Equation (19)) yields the following:
The coefficient matrix of Equation (20) is a singular matrix. Therefore, it can be solved using the elastic network algorithm [
25] with the following optimization objective:
where
is the elastic network optimization objective;
b is the CMM volumetric error;
A is the coefficient matrix of the objective equation system of the quasi-rigid body model;
α is the penalty factor of the elastic network algorithm;
k is the
k-th geometric error,
k = 1, 2, 3, …,
f;
f is the number of geometric errors to be solved; and
t is the reconciliation parameter (
t ≥ 0). The coordinate descent method, or Lagrangian duality, is used to solve the elastic network. The coefficients of the four angular motion errors
comprise the coordinates of the initial measurement point, which is the origin of these coordinates. Therefore, only 17 geometric errors can be solved using an elastic network algorithm. The angular motion error
is obtained based on the geometric model of the volumetric and uniaxial geometric errors by QR decomposition.