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Journal: Photonics, 2024
Volume: 11
Number: 526
Article:
Shallow Trench Isolation Patterning to Improve Photon Detection Probability of Single-Photon Avalanche Diodes Integrated in FD-SOI CMOS Technology
Authors:
by
Shaochen Gao, Duc-Tung Vu, Thibauld Cazimajou, Patrick Pittet, Martine Le Berre, Mohammadreza Dolatpoor Lakeh, Fabien Mandorlo, Régis Orobtchouk, Jean-Baptiste Schell, Jean-Baptiste Kammerer, Andreia Cathelin, Dominique Golanski, Wilfried Uhring and Francis Calmon
Link:
https://www.mdpi.com/2304-6732/11/6/526
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