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Journal: Photonics, 2023
Volume: 10
Number: 289
Article:
A Measurement System with High Precision and Large Range for Structured Surface Metrology Based on Atomic Force Microscope
Authors:
by
Junjie Wu, Xiaoyu Cai, Jiasi Wei, Chen Wang, Yong Zhou and Kaixin Sun
Link:
https://www.mdpi.com/2304-6732/10/3/289
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